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Sputtered

After a heat treatment of several hours the electrodes are deposited by sputtering a 50 nm base layer of Ni/Cr or NiAVi followed by 1.5 pm Au-layer generated by galvanization. [Pg.841]

Ions are also used to initiate secondary ion mass spectrometry (SIMS) [ ], as described in section BI.25.3. In SIMS, the ions sputtered from the surface are measured with a mass spectrometer. SIMS provides an accurate measure of the surface composition with extremely good sensitivity. SIMS can be collected in the static mode in which the surface is only minimally disrupted, or in the dynamic mode in which material is removed so that the composition can be detemiined as a fiinction of depth below the surface. SIMS has also been used along with a shadow and blocking cone analysis as a probe of surface structure [70]. [Pg.310]

Figure Bl.17.8. Iron oxide particles coated with 4 nm of Pt in an m-planar magnetron sputter coater (Hennann and Mtiller 1991). Micrographs were taken in a Hitachi S-900 in-lens field emission SEM at 30,000 primary magnification and an acceleration voltage of 30 kV. Image width is 2163 nm. Figure Bl.17.8. Iron oxide particles coated with 4 nm of Pt in an m-planar magnetron sputter coater (Hennann and Mtiller 1991). Micrographs were taken in a Hitachi S-900 in-lens field emission SEM at 30,000 primary magnification and an acceleration voltage of 30 kV. Image width is 2163 nm.
The fonnation of clusters in the gas phase involves condensation of the vapour of the constituents, with the exception of the electrospray source [6], where ion-solvent clusters are produced directly from a liquid solution. For rare gas or molecular clusters, supersonic beams are used to initiate cluster fonnation. For nonvolatile materials, the vapours can be produced in one of several ways including laser vaporization, thennal evaporation and sputtering. [Pg.2388]

The deposition of amoriDhous hydrogenated silicon (a-Si H) from a silane plasma doped witli diborane (B2 Hg) or phosphine (PH ) to produce p-type or n-type silicon is important in tlie semiconductor industry. The plasma process produces films witli a much lower defect density in comparison witli deposition by sputtering or evaporation. [Pg.2806]

Harper J M E, Cuomo J J and Kaufman H R 1982 Technology and applications of broad-beam ion sources used in sputtering. Part II. Applications J. Vac. Sc/. Technol. 21 737-56... [Pg.2940]

Barish E L, Vitkavage D J and Mayer T M 1985 Sputtering of chlorinated silicon surfaces studied by secondary ion mass spectrometry and ion scattering spectroscopy J. AppL Phys. 57 1336-42... [Pg.2941]

Sigmund P 1969 Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets Phys. Rev. 184 383-416... [Pg.2941]

Thompson M W II 1968 The energy spectrum of e]ected atoms during the high energy sputtering of gold Phil. Mag. 18 377-414... [Pg.2941]

Feil H, Dieleman J and Garrison B 1993 Chemical sputtering of Si related to roughness formation of a Cl-passivated Si surface J. Appi. Phys. 74 1303-9... [Pg.2942]

Barone M E and Graves D B 1995 Chemical and physical sputtering of fluorinated silicon J. Appi. Phys. 77 1263-74... [Pg.2942]

Back-sputtering Backswept turbine Backus process BaC12... [Pg.85]

Ion-beam lithography Ion beam mixing Ion beam processing Ion beams Ion-beam sputtering Ion channels Ion chromatogram Ion chromatography... [Pg.520]

Sputtered Co-Cr films Sputtered hard disks Sputtering... [Pg.922]


See other pages where Sputtered is mentioned: [Pg.175]    [Pg.303]    [Pg.303]    [Pg.303]    [Pg.305]    [Pg.1331]    [Pg.1641]    [Pg.1813]    [Pg.1822]    [Pg.1828]    [Pg.1859]    [Pg.1859]    [Pg.2390]    [Pg.2390]    [Pg.2802]    [Pg.2803]    [Pg.2804]    [Pg.2931]    [Pg.2936]    [Pg.2941]    [Pg.416]    [Pg.36]    [Pg.37]    [Pg.37]    [Pg.38]    [Pg.199]    [Pg.70]    [Pg.248]    [Pg.450]    [Pg.588]    [Pg.843]    [Pg.891]    [Pg.990]   
See also in sourсe #XX -- [ Pg.78 ]




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AC sputtering chamber

AES sputter depth profiling

Aluminium Sputtered

Anodized tantalum-sputtered glass

Ar ion sputtering

Ar+ sputtering

Argon ion sputtering

Argon sputtering

Atomic SIMS, sputtering techniques

Atomization sputter

Auger sputter depth profiles

Beam Sputtering

Beam sources sputtering

Carbon sputter coating

Catalyst sputter coating

Cathode sputtering

Cathodic sputtering process

Ceramic Target Magnetron Sputtering

Cesium sputter ion source

Cesium sputtering technique

Chemical Surface Composition of Sputtered ZnO Films

Chemistry Characterized by XPS and Sputtered Neutral Mass Spectroscopy

Coating deposition magnetron sputtering

Coating magnetron sputtering

Coating methods sputtering

Coating sputtered

Collision sputtering

Composites sputtering damage

Conducting target sputtering

DC magnetron sputtering technique

Dc sputtering

Dc-magnetron sputtering

Defect mediated sputtering model

Deposition by d.c. Magnetron Sputter with a Hot Boron Target

Deposition magnetron sputter

Deposition methods sputtering

Deposition reactive sputter

Deposition sputtering

Depth profiling preferential sputtering

Differential sputtering

Diode sputtering

Direct current sputtering

Direct sputtering

Direct-current magnetron sputtering

Direct-deposition processing techniques sputtering

Dual ion beam sputtering

Dynamic SIMS, sputtering techniques

Effects of Co-Sputtered Nickel in Different Atmospheres

Effects of Co-Sputtering

Effects of Sputtering Variables on Film Structure

Electrode materials, sputtering

Electrode materials, sputtering argon plasma

Electrode materials, sputtering methane plasma

Electron beam sputtering

Electron beam sputtering technique

Electron microscopy sputter coating

Electron sputtering

Electroplating sputtering process

Energy distribution, of sputtered particles

Evaporation and Sputtering

Evaporation/sputtering, thin metal films

Examples of Sputtered Films

Fracture of Columnar Sputtered Film

Gas flow sputtering

Glow discharge sputter-atomization

Gradient sputtering

High Power Impulse Magnetron Sputtering

High Power Impulse Magnetron Sputtering HIPIMS)

High current density sputtering

High-pressure sputtering system

High-temperature sputtering

History of ZnO Sputtering

Hollow Cathode Sputtering

Hot Filament-Assisted Sputtering

Hydrogen plasma sputtering

Input power, sputter rate

Ion beam sputter coatings

Ion beam sputtering

Ion implantation sputtering

Ion plasma sputtering

Ion sputter etching

Ion sputtering

Ion sputtering process

Ionized magnetron sputtering

Jet-enhanced sputtering

Kinetic sputtering

Kinetically assisted potential sputtering

Kinetics of Reactive Sputter Deposition Hysteresis Effect

Knock-on sputtering

Laser sputtering

Linear cascade sputtering

Lithography and Related Processes (Deposition, Sputtering, Other Relevant Technologies)

Magnetron Sputtering Method

Magnetron Sputtering of ZnO

Magnetron sputtering

Magnetron sputtering deposition

Magnetron sputtering method, dense

Magnetron sputtering system

Materials surface: sputtering

Metal carbides sputtering method

Metals sputtering

Minerals sputtering

Molecular SIMS sputtering

Molecular dynamics sputtering

Monitoring sputtering rate

Multiple layer sputtering

Nanomaterials, synthesis sputtering

Nitrides reactive sputtering

Operating Parameters on Sputter Cleaning

Other Sputtering Models

Other Technologies for Sputter Deposition of ZnO

Oxide electrodes sputtered

Oxide films sputter-deposition

Palladium plasma-sputtering

Parallel Sputter Coating

Penning sputtering

Performance of Sputtered Coatings

Physical Sputter Deposition

Physical Sputter Etching

Physical Sputtering and Chemical Etching

Physical Sputtering of Liquid Metal Surfaces

Physical magnetron sputtering

Physical sputtering

Physical sputtering mechanism

Physical sputtering threshold

Physical sputtering yield

Physical vapor deposition sputtering

Plasma sputtering, aluminum alloys

Plasma technology sputtering/metallic deposition

Plasmas: sputtering

Platinum sputtering

Polyatomic materials sputtering

Potential sputtering

Preferential sputtering, chemical

Principle of Sputtering

Processing methods sputtering

RF Magnetron Sputtering of Fluoropolymer Films

RF-sputtering

Radiation damage and sputtering

Radio Frequency (r.f.) Magnetron Sputtering

Radio Frequency magnetron sputtering method

Radio frequency RF magnetron sputtering

Radio frequency RF sputtering

Radio frequency magnetron sputtering

Radio frequency magnetron sputtering deposition

Radio frequency magnetron sputtering fluoropolymer film deposition

Radio frequency magnetron sputtering process description

Radio frequency sputtering

Radiofrequency Sputtering

Reactive Sputter Deposition Processes

Reactive magnetron sputtering

Reactive radio frequency sputtering

Reactive sputtering

Reactive-sputter etching

Recoil sputtering

Rf magnetron sputtering

Rf-sputtered films

Rotatable Target Magnetron Sputtering

SNMS (sputtered neutral mass

Schematic Diagram of a Typical R-F Sputtering System

Screening sputtering

Seed sputtering

Self-sputtering

Silicon sputtering

Simultaneous Sputter Coating and LCVD

Sites sputtering

Sputter

Sputter Cleaning of Cathode Surface

Sputter Deposition of PTFE, PVDF. and FEP

Sputter Deposition of ZnO onto CdS

Sputter Deposition of cBN Films

Sputter Deposition with Conducting Targets

Sputter Yield Dependence on Substrate

Sputter annealing

Sputter beam

Sputter cleaning

Sputter cleaning cathode surface

Sputter coater

Sputter coaters

Sputter coating

Sputter damage

Sputter deposition

Sputter deposition alloys

Sputter deposition applications

Sputter deposition biased

Sputter deposition collimated

Sputter deposition composite materials

Sputter deposition compounds

Sputter deposition elements

Sputter deposition graded structures

Sputter deposition layered structures

Sputter deposition processes

Sputter deposition pulse power

Sputter depth profiling

Sputter desorption

Sputter etching

Sputter induced damage

Sputter ion plating

Sputter procedures

Sputter profile

Sputter pumps

Sputter rate

Sputter rate equations

Sputter rate system pressure

Sputter redeposition, sputtering

Sputter source

Sputter threshold

Sputter yield

Sputter-Ion Depth Profiling

Sputter-Model

Sputter-deposited

Sputter-deposited Pt films

Sputter-deposited films

Sputter-depth profiles

Sputter-induced reduction

Sputter-initiated resonance-ionization

Sputter-initiated resonance-ionization spectroscopy

Sputtered Films

Sputtered Material

Sputtered Tantalum Membrane

Sputtered absorption spectrum

Sputtered amorphous silicon, hydrogen

Sputtered atoms ionization

Sputtered catalyst library

Sputtered ion source

Sputtered ions

Sputtered metal-polyimide interface

Sputtered neutral

Sputtered neutral atom mass

Sputtered neutral atom mass spectrometry

Sputtered neutral mass spectrometry

Sputtered neutral mass spectroscopy

Sputtered neutral mass spectroscopy SNMS)

Sputtered oxide films

Sputtered particles, energy distribution

Sputtered surface films

Sputtering

Sputtering

Sputtering (electrical atomization

Sputtering Materials

Sputtering Variables

Sputtering adhesion

Sputtering alloy

Sputtering angular distribution

Sputtering atomic spectroscopy

Sputtering boron carbides

Sputtering boron nitrides

Sputtering by Ion Impact

Sputtering by Non-recycling Ions (Mixed Materials)

Sputtering carbon nitrides

Sputtering cathodic

Sputtering chemical

Sputtering composition changes

Sputtering computer simulation

Sputtering crater

Sputtering definition

Sputtering deposited energy

Sputtering deposition systems

Sputtering deposition-wet oxidation

Sputtering diamond-like carbon films

Sputtering dielectric film

Sputtering discussion

Sputtering effects, dynamic SIMS

Sputtering efficiency

Sputtering endurance

Sputtering equilibrium

Sputtering experiment

Sputtering film structure

Sputtering for Film Deposition

Sputtering friction

Sputtering glow discharge

Sputtering hydrothermal synthesis

Sputtering in SIMS

Sputtering insertion materials

Sputtering ion bombardment

Sputtering ion source

Sputtering ionization

Sputtering materials factor

Sputtering metallization process

Sputtering method

Sputtering of Alloys and Compounds

Sputtering of Pure Elements

Sputtering of Single-Element Targets

Sputtering of ions

Sputtering of metals

Sputtering plants

Sputtering preferential

Sputtering preparation

Sputtering process

Sputtering process artifacts

Sputtering process, and

Sputtering pulsed mode

Sputtering rate

Sputtering rate, SIMS

Sputtering reaction

Sputtering simulations

Sputtering solid electrolytes

Sputtering sources

Sputtering spectroscopy

Sputtering sputter yield

Sputtering steady state

Sputtering system

Sputtering target

Sputtering target configurations

Sputtering target fabrication

Sputtering target materials

Sputtering target purity

Sputtering target specifications

Sputtering techniques

Sputtering thin film sensor fabrication

Sputtering threshold

Sputtering time

Sputtering uniformity

Sputtering yield

Sputtering yields, definition

Sputtering zinc oxide films

Sputtering, Electron Bombardment, Oxide-Chloride Conversion

Sputtering, SIMS

Sputtering, SIMS characteristics

Sputtering, SIMS matrix effect

Sputtering, Superconducting Films

Sputtering, description

Sputtering, physical alloys

Sputtering, physical compounds

Sputtering, physical elements

State of the Art in Industrial Magnetron Sputtering

Structure of the Sputtered Coating

Surface Erosion During Implantation Sputtering

Surface analysis by resonance ionization of sputtered atoms

Surface roughening, sputtering

Surfaces chemical sputtering

Surfaces physical sputtering

Synthesis sputter deposition

Target preparation sputtering

The Sputtering Process

Thermal sputtering

Thickness Uniformity and Mass Efficiency in Sputtering

Thin film production by the sputtering of metals

Thin film technology magnetron sputtering

Thin film technology sputtering

Thin films sputtering

Thin sputtering

Thin-film sputter deposition

Triode sputtering

Typical problems that might be encountered when sputter profiling, and their solutions

Unbalanced magnetron sputtering

Vacuum deposition techniques sputtering

Vacuum magnetron sputtering films

Vacuum sputtered films

Vacuum sputtering

Vaporization sputter

Volatilization sputtering

Zinc oxide sputter deposition

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