Magnetron sputtering method, dense

The methods for preparation of nonporous composite membrane catalyst are discussed in Ref. 10. The porous stainless steel sheets were covered with a dense palladium alloy film by magnetron sputtering [113] or by corolling of palladium alloy foil and porous steel sheet. The electroless plating of palladium or palladium alloy on stainless steel [114] or on porous alumina ceramic [115,116] gives the composite membranes with an ultrathin, dense palladium top layer. 

In the last decade, a variety of porous substrates were proposed for supporting the dense membranes, such as ceramics, metals, and alloys [42-44]. In those studies, special attention was paid to the LSCF coating on metallic substrates by using physical methods such as plasma spray physical vapor deposition and magnetron sputtering as an alternative to the wet chemical deposition methods [43,44]. When considering ceramic substrates, besides the elastic behavior and the thermal expansion of the perovskites, other properties such as toughness... 

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