Zinc oxide sputter deposition

Dye sensitized solar cells built without any transparent metal oxide electrodes (ITO or FTO) were presented recently by Kashiwa et The layout of the device is shown in Figure 11. To fabricate such device, titanium dioxide paste was coated directly on a glass substrate. On the top of Ti02 layer, tetrapode-shaped nanocrystals of zinc oxide were deposited by electrospray technique. A layer of metal titanium was sputtered on the top. Following etching of the zinc oxide template produced pores in the titanium layer. 

Other electrically conductive transparent oxides include fluorine- and chlorine-doped oxides such as hn oxide (Sn02 FI) antimony-doped hn oxide (Sn02 Sb) cadmium oxide (CdO), Cd2Sn04 and aluminum-doped zinc oxide (ZnO A1 or ZAO). Non-transparent electrically conduchve oxides include chromium oxide (Cr203) the copper oxides (CuO, CU2O) lead oxide (PbO) and rubidium oxide (RbO). In addihon to sputter deposition, conduchve oxide films can also be prepared by spray pyrolysis, reachve evaporation, and CVD. 

The role of the piezoelectric transducer is to convert electric signals to acoustic signals, and back again. Zinc oxide is used typically for the transducer at frequencies of 100 MHz or more. The transducer is sputtered onto the electrode (lower portion) deposited on the polished surface of the buffer rod. Electrode is made from either chromium-gold or titanium-gold. The electrode (upper portion) is deposited on the zinc oxide using a mask plate for matching the center of the electrode (upper portion) and that of the lens. 

Antimony-doped tin oxide can also be deposited by sputtering, but the sheet resistance is not as low as with sputtered indium-tin oxide. In addition, for the tin oxide concentrations normally used, the indium-tin oxide films can be readily etched in hydrochloric acid. Antimony-doped tin oxide films are not readily soluble in acids or bases, but they can be etched by a procedure using zinc dust and hydrochloric acid. ... 

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