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Thin film technology magnetron sputtering

Hoffman, D.W. (1994), Perspective on stresses in magnetron-sputtered thin films , Journal of Vacuum Science and Technology A, 12, 953-961. [Pg.238]

H.J. Zhang, D.Z. Wen, Antibacterial properties of Sb- Ti02 thin films by RE magnetron co-sputtering , Surface Coatings Technology, 201, 5720-5723, (2007). [Pg.157]

A.S. Penfold, Magnetron sputtering, in D.A. Glocker, S.I. Shah (Eds.). Handbook of Thin Film Process Technology, vol. 1, Taylor Francis, 2002, (Section A3.2). [Pg.281]

See other pages where Thin film technology magnetron sputtering is mentioned: [Pg.403]    [Pg.414]    [Pg.206]    [Pg.507]    [Pg.485]    [Pg.189]    [Pg.189]    [Pg.202]    [Pg.218]    [Pg.17]    [Pg.369]    [Pg.413]    [Pg.70]    [Pg.541]    [Pg.413]    [Pg.106]   
See also in sourсe #XX -- [ Pg.182 , Pg.424 ]



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