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Sputtering efficiency

Experimental values for tire sputtering efficiency tend to show lower values of a for elements, such as aluminium and mngsten which form stable oxides, compared with the metals such as gold and platinum which do not under normal experimental conditions. This is probably due to the presence of a surface oxide, since industrial sources of argon, which are used as a source of ions for example, usually contain at least 1 ppm of oxygen, which is more than enough to oxidize aluminium and tungsten. [Pg.19]

Aberth, W.H. Burlingame, A.L. Effect of Primary Beam Energy on the Secondary-Ion Sputtering Efficiency of Liquid Sec-ondary-lonization-MS in the 5-30-KeV Range. Anal. Chem. 1988, 60, 1426-1428. [Pg.405]

Helium is not suitable, as its small mass renders its sputtering efficiency negligible. The sputtering rates further increase in the sequence Ne < Ar < Kr < Xe... [Pg.673]

See other pages where Sputtering efficiency is mentioned: [Pg.19]    [Pg.20]    [Pg.19]    [Pg.20]    [Pg.105]    [Pg.68]    [Pg.399]    [Pg.144]    [Pg.193]    [Pg.267]    [Pg.249]    [Pg.144]    [Pg.17]    [Pg.37]    [Pg.99]    [Pg.96]    [Pg.154]    [Pg.50]    [Pg.704]   
See also in sourсe #XX -- [ Pg.144 ]

See also in sourсe #XX -- [ Pg.144 ]



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