Penning sputtering

K. R. Peters, Penning Sputtering of Ultra Thin Metal Films for High Resolution Electron Microscopy, in Preparation of Biological Specimens for Scanning Electron Microscopy (eds. J. A. Murphy and G. M. Roomans), SEM, Chicago, 1980, pp. 173-184. 

There are a variety of other coating methods. Three of these are the electron beam (E beam) technique. Penning sputtering and saddle field ion beam sputtering. The methods require more... 

I have travelled in every quarter of 1he globe f have seen such -wonders of Nature that my pen yet sputters when I try to tell them I have seen many a miracle of the genius of man but I have never seen a marvel like to this. 

There are many more types of cluster ion sources than there are neutral cluster sources, in part because of the wide variety of ion-forming techniques available and in part because cluster ion sources are often hybrids of established neutral cluster sources and ion-forming environments. Some non-hybrid ion sources which can generate cluster ions include ion sputter, flow tube. Penning... 

As indicated in Chapter 4, sputter ion pumps are based on sorption processes initiated by gas ions formed in a Penning discharge and SIPs achieve their high pumping speed by incorporating many individual Penning cells. 

The four 4s levels play a key role in analytical glow discharges (e.g. for Penning ionization of the sputtered atoms) and they cannot easily be depopulated by radiative decay (due to forbidden transitions for the metastable levels, and to radiation trapping for the resonant levels). Therefore some additional loss processes are incorporated for these levels, in order to describe them with more accuracy ... 

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