Radiofrequency Sputtering

Cooley, D.R., van Dellen, A.F., Burgess, J.O., and Windeler, A.S. (1992) The advantages of coated titanium implants prepared by radiofrequency sputtering from hydroxyapatite. / Prosthet. Dent., 67 (1), 93-100. 

Deposition of insulating layers is solved by radio frequency (rf) sputtering. In industrial applications, however, cooling problems and inacceptable low deposition rates restrict the use of radiofrequency sputtering. Other methods have been developed to overcome these limitations. 

ZnP. Radiofrequency sputtering of Zn in a PH3 atmosphere leads to the deposition of ZnP [171] or Zn3P2 [172] films. Films of the latter composition can also be grown by reactions of PH3 with Zn vapor [173]. 

Within an N/B ratio of 1 to 0.3 (at%) the N 1s and B Is peaks consisted of at least two well distinguishable branches. This splitting has been attributed to isolated structures occurring in deposits formed either by a neutral process without ion enhancement or in radiofrequency-sputtered boron nitride. Intensity changes after ion milling are probably due to the abundance of hydrogen in the films [15]. 

By cosputtering Cr and BN by magnetron radiofrequency sputtering, amorphous Cr/BN films are obtained which have superconducting transition temperatures up to 1.14 K and an orbital contribution (i.e., (dHc2 /dT)jc) as large as 49 kOe/K. In order to be amorphous, the boron nitride content in the film must be >15%. The same behavior is observed with Mo/BN films [53]. 

NbN/BN granular films are sensitive, high-speed detectors for pulsed far infrared radiation. These films are deposited on sapphire or quartz substrates by reactive radiofrequency sputtering of a split Nb/BN target in an Ar/N2 atmosphere. These devices can also be operated in the superconducting or resistive region critical temperatures range between 1.6 to 15 K,... 

Polytetrafluoroethylene coatings deposited together with boron nitride by radiofrequency sputtering are applied to molded rubber parts in order to reduce their dynamic friction [27] the same holds true for perfluoropolyether compositions [28]. 

Cubic BN can also be obtained at low pressure in the field of stability of h-BN under nonequilibrium conditions, in analogy to the formation of diamond or diamond-Hke carbon films. As in the case of diamond, CVD, plasma-assisted chemical vapor deposition (PACVD), and PVD methods such as ion beam bombardment, radiofrequency sputter deposition, laser ablation, and magnetron sputtering can each be appHed. 

When LiMn204 electrodes are deposited as thin films on a platinum substrate, either by electron-beam evaporation or radiofrequency (rf) sputtering, structures are sometimes formed that exhibit unusual electrochemical behavior [146, 147]. Such electrodes have been evaluated in solid-... 

In addition to microwave plasma, direct current (dc) plasma [19], hot-filament [20], magnetron sputtering [21], and radiofrequency (rf) [22-24] plasmas were utilized for nanocrystalline diamond deposition. Amaratunga et al. [23, 24], using CH4/Ar rf plasma, reported that single-crystal diffraction patterns obtained from nanocrystalline diamond grains all show 111 twinning. 

RF sputtering Metals, semiconductors, insulators Radiofrequency oscillation breaks down the space charge that would inhibit direct dc deposition of insulators... 

Terauchi S., Koshizaki M. and Umehara H., (1995) Fabrication of Au nanoparticles by radiofrequency magnetron sputtering, Nanostruct. Mater. 5, 71-78. 

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