Surface analysis by resonance ionization of sputtered atoms

From the 1980s onwards, dedicated setups (and acronyms) have been developed, e.g., SALI (Becker and Gillen, 1984), sputter initiated resonance ionization spectrometry (SIRIS) (Parks, 1990), surface analysis by resonant ionization of sputtered atoms (SARISA, Pellin et al., 1989), and the Chicago-Argonne resonance ionization mass analysis (CHARISMA, Ma et al., 1995). The recent proliferation of commercial time-of-flight (TOP) secondary ion mass spectrometry (SIMS) instruments stimulates their conversion into SALI setups. 

The closely allied topics of secondary neutral mass spectrometry (SNMS), fast atom bombardment (FAB), and laser ablation SIMS are important, but are beyond the scope of this chapter. SNMS is a technique in which neutral atoms or molecules, sputtered by an ion beam, are ionized in an effort to improve sensitivity and to decouple ion formation from matrix chemical properties, making quantification easier. This ionization is commonly effected by electron beams or lasers. FAB uses a neutral atom beam to create ions on the surface. It is often useful for insulator analysis. Laser ablation creates ions in either resonant or nonresonant modes and can be quite sensitive and complex. 

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