Unbalanced magnetron sputtering

Fig. 2— Schemetics of (a) magnetron sputtering and (b) unbalanced magnetron sputtering.

Monaghan, D. R, Teer, D. G., Laing, K. C., Efeoglu, I., and Ar-nell, R. D., Deposition of Graded Alloy Nitride Films by Closed Field Unbalanced Magnetron Sputtering," Surf. Coat. Technol., Vol. 5 9,1993, pp. 21 -25. 

The introduction of unbalanced magnetron sputtering, in which part of the argon plasma can impinge on the substrate, allows ion bombardment of the coating as it forms. The use of ion-beam assisted deposition can be used concurrently or sequentially. This technique is described separately later in the chapter. 

Ion bombardment can be used in several different ways to alter the properties of sputter-deposited coatings. The simplest of these is unbalanced magnetron sputtering. 

O Brien J, Hughes R, Hisek J. Pd/Ag membranes on porous alumina substrates by unbalanced magnetron sputtering. Surf Coatings Technol. 2001 253 142-4. 

P. J. Kelly, O. A. Abu-Zeid, R. D. Arnell and J. Tong, The deposition of oxide coatings by reactive unbalanced magnetron sputtering. Surf Coat. Technol. 1996, 86-87, 28-32. 

Donohue LA, Miinz WD, Lewis DB, Cawley J, Hurkmans T, Trinh T, Petrov I, Greene JE. Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering. Surf CoatTechnol 1997 93 69-87. 

X.T. Zeng, TiN/NbN superlattice hard coatings deposited by unbalanced magnetron sputtering. Surf. Coat. Technol. 113(1-2), 75-79 (1999)... 

One equipment manufacturer uses a process where an adhesion layer is formed by arc vaporization and the coating thickness is built up by unbalanced magnetron sputter deposition (ABS process). The interface and hence the adhesion may be engineered using the HIPIMS technique,... 

Unified atomic mass unit Unbalanced magnetron Unbalanced magnetron sputtering Ultraclean high flow Upper explosive limit... 

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