Sputtering by Ion Impact

Sputtering relies on the fact that energy is conserved (first law of thermodynamics). Thus, by directing an energetic ion beam at a solid s surface (this can be an 

There also exist several forms of sputtering. These forms can be delineated based on the type of energy transfer process that induces atom, ion, or molecular emission. These are  

Kinetic sputtering describes the removal of surface-bound atoms, ions, or molecules, which occurs purely through the momentum transfer (elastic collisions). This form includes knock-on sputtering and recoil sputtering. 

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