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Direct current magnetron sputtering

Ishibashi S., Higuchi Y., Ola Y. and Nakamura K. Low resistivity indium tin oxide transparent conductive films. I. Effect of introducing H2O gas of H2 gas during direct current magnetron sputtering. J. Vac. Soc. Technol, 1989 AS 3-6. [Pg.144]

Figure 10.1 Schematic representation of the two-target direct current magnetron sputtering... Figure 10.1 Schematic representation of the two-target direct current magnetron sputtering...
Figure 10.12 Escherichia coli inactivation on co-sputtered direct current magnetron sputtering (pulsed) at different times using simultaneously an Ag and Zr target in Ar-10% N2 0.5 Pa atm. Current 300 mA. Figure 10.12 Escherichia coli inactivation on co-sputtered direct current magnetron sputtering (pulsed) at different times using simultaneously an Ag and Zr target in Ar-10% N2 0.5 Pa atm. Current 300 mA.
In addition to microwave plasma, direct current (dc) plasma [19], hot-filament [20], magnetron sputtering [21], and radiofrequency (rf) [22-24] plasmas were utilized for nanocrystalline diamond deposition. Amaratunga et al. [23, 24], using CH4/Ar rf plasma, reported that single-crystal diffraction patterns obtained from nanocrystalline diamond grains all show 111 twinning. [Pg.2]

Can the anode magnetron be used in the precleaning process of the metallic substrate that is used as the cathode in the cathodic plasma polymerization In a more broad sense, can the surface of metal (cathode) be cleaned by argon direct current (DC) discharge sputtering ... [Pg.307]

Utilize direct current (DC) magnetron sputter-deposited multi-component catalyst layers. [Pg.447]

Cold Cathode Direct Current (dc) Diode (Non-magnetron) Sputtering... [Pg.247]

See other pages where Direct current magnetron sputtering is mentioned: [Pg.451]    [Pg.100]    [Pg.1086]    [Pg.233]    [Pg.479]    [Pg.292]    [Pg.284]    [Pg.459]    [Pg.451]    [Pg.100]    [Pg.1086]    [Pg.233]    [Pg.479]    [Pg.292]    [Pg.284]    [Pg.459]    [Pg.209]    [Pg.315]    [Pg.251]    [Pg.19]    [Pg.485]    [Pg.144]    [Pg.369]    [Pg.396]    [Pg.304]    [Pg.73]    [Pg.232]    [Pg.302]    [Pg.127]    [Pg.210]    [Pg.940]    [Pg.171]    [Pg.321]    [Pg.37]    [Pg.14]    [Pg.226]    [Pg.239]    [Pg.438]    [Pg.249]    [Pg.181]    [Pg.173]    [Pg.363]   
See also in sourсe #XX -- [ Pg.713 ]



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Current directions

Direct current sputtering

Direct sputtering

Direct-current magnetron

Magnetron

Sputtered

Sputtering

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