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Sputter Cleaning of Cathode Surface

How effectively a DC discharge of argon could clean the cathode surface can be seen by observing the disappearance of color of the cathode, which is created by the deposition of TMS on a cold-rolled steel, by Ar discharge treatment [2]. The cathodic [Pg.319]

The effects depicted in these figures show the effectiveness of the anode magnetron in sputter cleaning of the cathode surface but also indicate the limitation of the sputter cleaning by means of the anode magnetron. While the treatment of well-defined surface, such as a flat sheet or a moving foil, could be treated efficiently [Pg.324]


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