Radio-frequency magnetron sputtering

K.R. Zhang, F.R. Zhu, C.H.A. Huan, and A.T.S. Wee, Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method, J. Appl. Phys., 86 974—980, 1999. 

H. Nakazawa, A. Sudoh, M. Suemitsu, K. Yasui, T. ltoh,T. Endoh, Y. Narita, M. Mashita, Mechanical and tribological properties of boron, nitrogen-coincorporated diamond-like carbon films prepared by reactive radio-frequency magnetron sputtering., Diamond and Related Materials, vol. 19, pp. 503-506, 2010. 

Ishizuka, S. O., Kato, S., Maruyama, T. and Akimoto, K. (2001). Nitrogen doping into Cu20 thin films deposited by reactive radio-frequency magnetron sputtering. Jpn. J. Appl. Phys. Part 1-Regular Papers Short Notes Review Papers 40(4B), 2765-2768. 

Kikuchi, H., Kitano, M., Takeuchi, M., Matsuoka, M., Anpo, M. and Kamat, P. V. (2006). Extending the photoresponse of Ti02 to the visible light region Photoelectrochemical behavior of Ti02 thin films prepared by the radio frequency magnetron sputtering deposition method. J. Phys. Chem. B 110(11), 5537-5541. 

Kim, K. H., Park, K. C. and Ma, D. Y. (1997). Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering. J. Appl. Phys. 81(12), 7764-7772. 

Chiou B.S., Hsieh S.-T., Wu W.-F. Deposition of indium tin oxide films on acrylic substrates by radio-frequency magnetron sputtering J. Am. Ceram. Soc. 1994 77 1740-44. 

Figure 5.18 Schematic rendering of a radio-frequency magnetron sputtering vacuum chamber. (After Surmenev (2012).)...

N., and Jansen, J.A. (2008) Characterization and in vitro evaluation of biphasic calcium pyrophosphate-tricalcium phosphate radio frequency magnetron sputter coatings. J. Biomed. Mater. Res. A, 84 (3), 682 - 690. 

Radio frequency magnetron sputtering Decomposition of methylene blue in an aqueous solution [539]... 

Sberveglieri G., Groppelli S., and Coccoli G., Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (TTO) thin films for NO2 gas sensors. Sens. Actuators B, 15, 235-242, 1988. 

Because of isotropic expansion of the particles/grains, amorphous thin-hlm silicon anodes typically perform better than crystalline thin hlms. Maranchi et al. [12, 72] demonstrated that 250-nm-thick amorphous silicon thin hlms deposited by radio-frequency magnetron sputtering on copper substrates achieved near theoretical capacity for a limited number of cycles. The authors stated that growth of... 

Ohnishi R, Katayama M, Takanahe K, Kubota J, Domen K (2010) Niobium-based catalysts prepared by reactive radio-frequency magnetron sputtering and arc plasma methods as nonnoble metal cathode catalysts for polymer electrolyte fuel cells. Electrochim Acta 55 5393-5400... 

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