Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Sputtered Tantalum Membrane

Mukherjee et al. [96] used sputtered tantalum, as tantalum is reported [97] to be a cheap alternative with better permeation properties when coated with palladium compared with membranes made completely of palladium. [Pg.355]

See other pages where Sputtered Tantalum Membrane is mentioned: [Pg.355]    [Pg.355]    [Pg.10]    [Pg.128]    [Pg.207]    [Pg.88]    [Pg.119]    [Pg.122]    [Pg.127]   


SEARCH



Sputtered

Sputtering

© 2024 chempedia.info