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Sputter deposition graded structures

Structured (single crystalline, polycrystalline, or microcrystalline) semi-conductor-grade SiC layers are produced primarily by chemical vapor deposition [18], vapor-phase epitaxy (VPE) [19], molecular beam epitaxy (MBE) [20], glow discharge [21], or sputtering processes [22]. [Pg.65]

See other pages where Sputter deposition graded structures is mentioned: [Pg.496]    [Pg.389]    [Pg.260]    [Pg.445]    [Pg.450]    [Pg.460]    [Pg.172]    [Pg.356]    [Pg.454]    [Pg.260]    [Pg.265]   
See also in sourсe #XX -- [ Pg.260 ]



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