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Sputter cleaning cathode surface

The effects depicted in these figures show the effectiveness of the anode magnetron in sputter cleaning of the cathode surface but also indicate the limitation of the sputter cleaning by means of the anode magnetron. While the treatment of well-defined surface, such as a flat sheet or a moving foil, could be treated efficiently... [Pg.324]

Can the anode magnetron be used in the precleaning process of the metallic substrate that is used as the cathode in the cathodic plasma polymerization In a more broad sense, can the surface of metal (cathode) be cleaned by argon direct current (DC) discharge sputtering ... [Pg.307]

See other pages where Sputter cleaning cathode surface is mentioned: [Pg.261]    [Pg.261]    [Pg.319]    [Pg.320]    [Pg.321]    [Pg.323]    [Pg.1033]    [Pg.787]    [Pg.257]    [Pg.297]    [Pg.298]    [Pg.135]    [Pg.82]    [Pg.376]    [Pg.399]    [Pg.250]    [Pg.778]    [Pg.448]   
See also in sourсe #XX -- [ Pg.319 ]



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Cathode surface

Sputtered

Sputtering

Sputtering cathodic

Surface cleaning

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