RF Magnetron Sputtering of Fluoropolymer Films

Over the last decade, selected papers have examined the deposition of fluoropolymers, using RF magnetron sputtering. All of these papers have examined the deposition of FIFE, with some of them also studying the deposition of polyimide (PI) films. This chapter extends these studies and will report on the sputter deposition behavior of PTFE (polytetrafluoroethylene), PVDF (polyvinylidenefiuoride), and FEP (fluorinated ethylene propylene copolymer) films. 

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