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Lithography and Related Processes Deposition, Sputtering, Other Relevant Technologies

1 Lithography and Related Processes (Deposition, Sputtering, Other Relevant Technologies) [Pg.142]

In this section, we overview the various approaches by researchers utilised in order to fabricate microelectrodes and arrays of microelectrodes which inherently have their individual advantages and disadvantages. [Pg.142]

Langon et al. demonstrate the electrochemical differences in two arrays fabricated using two different methods electroplating versus electron beam metallisation [24]. Electron-beam evaporation consists of exposing the metal to a beam of high-energy [Pg.144]

Clearly, boron-doped diamond arrays are viable, though each possesses its own pros and cons. Again, the cost of these arrays is yet to be confirmed and time will tell whether mass production is viable both factors will dictate their market implementation within diagnostic devices, for example. [Pg.148]

In the above section, we have seen some fascinating approaches to produce electrodes and electrode arrays. It can be observed that lithography and related techniques allow arrays to [Pg.148]




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Deposition process

Other processes

Sputter deposition processes

Sputtered

Sputtering

Sputtering process

Sputtering process, and

Technological process

Technology processability

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