Radio Frequency magnetron sputtering method

K.R. Zhang, F.R. Zhu, C.H.A. Huan, and A.T.S. Wee, Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method, J. Appl. Phys., 86 974—980, 1999. 

Kikuchi, H., Kitano, M., Takeuchi, M., Matsuoka, M., Anpo, M. and Kamat, P. V. (2006). Extending the photoresponse of Ti02 to the visible light region Photoelectrochemical behavior of Ti02 thin films prepared by the radio frequency magnetron sputtering deposition method. J. Phys. Chem. B 110(11), 5537-5541. 

Ohnishi R, Katayama M, Takanahe K, Kubota J, Domen K (2010) Niobium-based catalysts prepared by reactive radio-frequency magnetron sputtering and arc plasma methods as nonnoble metal cathode catalysts for polymer electrolyte fuel cells. Electrochim Acta 55 5393-5400... 

The main deposition methods of NS-Ti02 onto stainless steels are cathodic arc deposition [532], electrophoretic deposition [533], anodic spark deposition (ASD) [534], the sol-gel method [535, 536], atmospheric pressure metal organic CVD (AP-MOCVD) [537, 538] and radio frequency (RF) magnetron sputtering [539]. Preparation methods and applications of NS-Ti02 thin films on stainless steel have been summarized in Table 15. 

---