DC magnetron sputtering technique

In a biosensor application, Wolfson and his research group [10] employed microfabrication techniques to produce miniature electrodes for potential implantable, non-enzyme-based glucose sensors. Thin-film techniques, such as DC magnetron-sputtered processing, were used to deposit platinum film or platinum film enhanced with titanium film on quartz substrates. The geometric shapes of the quartz substrate include cylindrical rods and rectangular plates in a... 

The fabrication of Mo-Si multilayer optics involves the alternating deposition of Mo and Si on highly polished substrates, often low-thermal-expansion glass using a range of deposition techniques based on DC magnetron sputtering, ... 

NS-Ti02 materials have been used for ammonia detection [277-280]. Suh etal. [277] proposed a thin film gas sensor planar structure of fabricated with Ti02 to monitor ammonia. They deposited a thin sensitive Ti02 film by a DC reactive magnetron sputtering technique onto a cleaned silicon substrate equipped with interdigitated comb shaped... 

Porous structure of the outer support surface has been modified by deposition of the additional layer of metal Ni. Two vacuum condensation techniques have been used for nickel deposition dc ion magnetron sputtering and electron beam evaporation. To produce coatings on tubes additional installation for dc sputtering has been designed. 

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