Sputter-initiated resonance ionization spectroscopy

In other articles in this section, a method of analysis is described called Secondary Ion Mass Spectrometry (SIMS), in which material is sputtered from a surface using an ion beam and the minor components that are ejected as positive or negative ions are analyzed by a mass spectrometer. Over the past few years, methods that post-ion-ize the major neutral components ejected from surfaces under ion-beam or laser bombardment have been introduced because of the improved quantitative aspects obtainable by analyzing the major ejected channel. These techniques include SALI, Sputter-Initiated Resonance Ionization Spectroscopy (SIRIS), and Sputtered Neutral Mass Spectrometry (SNMS) or electron-gas post-ionization. Post-ionization techniques for surface analysis have received widespread interest because of their increased sensitivity, compared to more traditional surface analysis techniques, such as X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), and their more reliable quantitation, compared to SIMS. [Pg.559]

Sputter-Initiated Resonance Ionization Spectroscopy Surface Analysis by Resonant Ionization Spectroscopy Time-of-Flight Mass Spectrometer... [Pg.768]

Hi) Methods based on mass spectrometry Spark-source mass spectrometry Glow-discharge mass spectrometry Inductively coupled-plasma mass spectrometry Electro-thermal vaporization-lCP-MS Thermal-ionization mass spectrometry Accelerator mass spectrometry Secondary-ion mass spectrometry Secondary neutral mass spectrometry Laser mass spectrometry Resonance-ionization mass spectrometry Sputter-initiated resonance-ionization spectroscopy Laser-ablation resonance-ionization spectroscopy... [Pg.208]

Sputter-Initiated Resonance-Ionization Spectroscopy SIRIS... [Pg.215]

Some less common acronyms for laser SNMS are also used, such as sputter-initiated resonance ionization spectroscopy (SIRIS) [287] and surface analysis by laser ionization (SALI) [288]. [Pg.912]