Radio frequency sputtering

Taguchi I, Pignolet A, Wang L, Proctor M, Levy F, Schmid PE (1993) Raman scattering from PbTiOs thin films prepared on silicon substrates by radio frequency sputtering and thermal treatment. J Appl Phys 73 394... 

Most of the time, metal/dielectric nanocomposites are studied in the form of solutions or thin solid films on a substrate Colloids, doped and annealed glasses, sol-gels, surfactant-stabilized nanoparticles, micelles, two- or three-dimension self-assembled nanocomposites, self-organized mesoporous oxides filled with metals, electrochemically-loaded template membranes, metal-ion implanted crystals, nanocomposite films elaborated by laser ablation, cluster-beam deposition, radio-frequency sputtering, or nanolithography. 

Fig. 3.32 Snapshots of the simulation of radio-frequency sputtering of an iron target with aluminum nitride. Fe atoms are depicted as medium grey spheres, Al as large dark spheres, and N as small...

C. Sella, J.C. Martin, J. Lecoeur, J.P. Bellier, M.F. Harmand, A. Nadji, J.P. Davidas, and A. Le Chanu, Corrosion protection of metal implants by hard biocompatible ceramic coatings deposited by radio-frequency sputtering. Clinical Materials, 5, 297-307 (1990). 

Azuma et al. have studied the electrochemical properties of transition metal nitrides prepared by a reactive radio-frequency sputtering method such as ZrN [22], NbN [23], CoN [24], TiN, and VN [23]. Electrochemical reduction of oxygen was... 

Silver and gold, which have relatively high vapor pressures, can be easily applied by vacuum evaporation, while metals of lower vapor pressure, such as platinum, palladium, and stainless steel, can be deposited by radio frequency sputtering in this case, however, the film thicknesses are limited to about 100 nm. Before electrode deposition, the samples must be cleaned and heat treated. Failure to ranove surface impurities will result in loss of adhesion when samples are subsequently heated during the measurement. 

Radio-frequency sputtering of a polymer target in a plasma composed of polymer fragments with argon added to the plasma... 

Films were radio-frequency sputtered onto the (100) surface of single crystals. These diffused into the substrate upon annealing at 250 to 350C. The change in the concentration gradient was determined by means of Auger and ion sputtering techniques. The diffiisivity could be described by ... 

X lO atm at 1000 to 1600C. A thin film of NiO was deposited onto the surface of CoO single crystals by means of radio-frequency sputtering. Concentration-penetration curves were then obtained by electron-beam micro-analysis and secondary ion mass spectrometry. The results could be described by ... 

Zhang C, Boudiba A, Navio C, Olivier M-G, Snyders R, DebUquy M (2012) Study of selectivity of NO sensors composed of WO3 and MnOj thin films grown by radio frequency sputtering. Sens Actuators B 161 914—922... 

J.-C. Chou, S.-I. Liu, S.-H. Chen, Sensing characteristics of ruthenium films fabricated by radio frequency sputtering, Japanese Journal of Apphed Physics 44 (2005) 1403. 

Drapchinsky, L.V., Shpakov, V.I. Preparation of actinide targets by radio-frequency sputtering. Nucl. Instrum. Methods A 362, 100-103 (1995)... 

Keywords— Wireless sensor network. Flexible array sensor. Radio frequency sputtering. Screen-printing, pH sensitivity. 

Co-deposition by radio frequency sputtering of SiC cluster confined in alumina matrix. Fringes due to crystallization are clearly seen on the surrounded regions on the picture... 

Mueller, T. (2009). Heterojunction Solar Cells (a-Si/c-Si), Logos, ISBN 978-3-8325-2291-9, Berlin Nakamura, M. Aoki, T. Hatanaka, Y. Korzec, D. Engemann, J. (2001). Comp>arison of Hydrophilic Properties of Amorphous TiOx Films Obtained by Radio Frequency Sputtering and Plasma-Enhanced Chemical Vapor Deposition. /. Mater. Res., Vol. 

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