Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Hot Filament-Assisted Sputtering

However, in recent times, there have been several reports on synthesis of the crystalline form of carbonitride. Zhang et al. " synthesized crystalline carbonitride films with large crystalline grains up to 10 pm (from SEM and XRD spectra) in size by RE plasma assisted hot filament chemical vapor deposition. Li. et al. claimed to have synthesized poly crystalline C3N4 films (from XRD data) at ambient temperature by RE diode sputtering. Erom Auger electron spectroscopy, the N/C ratio was computed to be 1.33 as required for C3N4 stoichiometry. [Pg.366]

See other pages where Hot Filament-Assisted Sputtering is mentioned: [Pg.154]    [Pg.68]    [Pg.73]    [Pg.73]    [Pg.73]    [Pg.154]    [Pg.68]    [Pg.73]    [Pg.73]    [Pg.73]    [Pg.930]    [Pg.755]    [Pg.757]    [Pg.313]   


SEARCH



Hot-filament

Sputtered

Sputtering

© 2024 chempedia.info