SNMS sputtered neutral mass

There are several methods available to probe the actual interphase to demonstrate the existence of interpenetrating networks directly. Among these techniques are depth profiling by SIMS (secondary ion mass spectrometry) or SNMS (sputtered neutral mass spectrometry), and the use of X-ray photoelectron spectroscopy (XPS) depth profiling or Auger electron spectroscopy (AES) depth profiling. 

SNMS Sputtered Neutral Mass Spectroscopy Surface, bulk Plasma discharge noble gases 0.6-20 keV Sputtered atoms ionized by atoms or electrons then mass analyzed 0.1-0.6 nm (or deeper ion milling) 1 cm Elemental analysis Z a 3 depth profile deleclion limit ppm 4.6... 

Sputtered Neutral Mass Spectrometry (SNMS) is the mass spectrometric analysis of sputtered atoms ejected from a solid surface by energetic ion bombardment. The sputtered atoms are ionized for mass spectrometric analysis by a mechanism separate from the sputtering atomization. As such, SNMS is complementary to Secondary Ion Mass Spectrometry (SIMS), which is the mass spectrometric analysis of sputtered ions, as distinct from sputtered atoms. The forte of SNMS analysis, compared to SIMS, is the accurate measurement of concentration depth profiles through chemically complex thin-film structures, including interfaces, with excellent depth resolution and to trace concentration levels. Genetically both SALI and GDMS are specific examples of SNMS. In this article we concentrate on post ionization only by electron impact. 

In other articles in this section, a method of analysis is described called Secondary Ion Mass Spectrometry (SIMS), in which material is sputtered from a surface using an ion beam and the minor components that are ejected as positive or negative ions are analyzed by a mass spectrometer. Over the past few years, methods that post-ion-ize the major neutral components ejected from surfaces under ion-beam or laser bombardment have been introduced because of the improved quantitative aspects obtainable by analyzing the major ejected channel. These techniques include SALI, Sputter-Initiated Resonance Ionization Spectroscopy (SIRIS), and Sputtered Neutral Mass Spectrometry (SNMS) or electron-gas post-ionization. Post-ionization techniques for surface analysis have received widespread interest because of their increased sensitivity, compared to more traditional surface analysis techniques, such as X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), and their more reliable quantitation, compared to SIMS. 

The atom flux sputtered from a solid surface under energetic ion bombardment provides a representative sampling of the solid. Sputtered neutral mass spectrometry has been developed as method to quantitatively measure the composition of this atom flux and thus the composition of the sputtered material. The measurement of ionized sputtered neutrals has been a significant improvement over the use of sputtered ions as a measure of flux composition (the process called SIMS), since sputtered ion yields are seriously affected by matrix composition. Neutral panicles are ionized by a separate process after sputter atomization, and SNMS quantitation is thus independent of the matrix. Also, since the sputtering and ionization processes are separate, an ionization process can be selected that provides relatively uniform yields for essentially all elements. 

Sputtered Neutrals Mass Spectrometry Secondary Neutrals Mass Spectrometry Direct Bombardment Electron Gas SNMS... 

In SNMS, sputtered neutrals are post-ionized before they enter the mass spectrometer. In contrast to SIMS, SNMS does not suffer from the matrix effects associated with the ionization probability of sputtered particles. Here, the sensitivity for a cer-... 

Spurted fibers, 11 240—241 Sputter deposition, 23 7, 24 728-736 advantages and disadvantages of, 24 736 Sputter depth profiling, 24 98-100 Sputtered gold coatings, 12 693 Sputtered neutral mass spectrometry (SNMS), 24 108... 

Another important characteristic is that ion beams can produce a variety of the secondary particles/photons such as secondary ions/atoms, electrons, positrons. X-rays, gamma rays, and so on, which enable us to use ion beams as analytical probes. Ion beam analyses are characterized by the respectively detected secondary species, such as secondary ion mass spectrometry (SIMS), sputtered neutral mass spectrometry (SNMS), electron spectroscopy, particle-induced X-ray emission (PIXE), nuclear reaction analyses (NRA), positron emission tomography (PET), and so on. 

Ion Sources for Secondary Ion Mass Spectrometry (SIMS) and Sputtered Neutral Mass Spectrometry (SNMS)... 

Secondary ion mass spectrometry (SIMS) and sputtered neutral mass spectrometry (SNMS) are today the most important mass spectrometric techniques for surface analysis, especially for thin layer analysis, for depth profiling, for the determination of contaminations and element distribution on a solid sample surface. 

Resonant and non-resonant laser post-ionization of sputtered uranium atoms using SIRIS (sputtered initited resonance ionization spectroscopy) and SNMS (secondary neutral mass spectrometry) in one instrument for the characterization of sub-pm sized single microparticles was suggested by Erdmann et al.94 Resonant ionization mass spectrometry allows a selective and sensitive isotope analysis without isobaric interferences as demonstrated for the ultratrace analysis of plutonium from bulk samples.94 Unfortunately, no instrumental equipment combining both techniques is commercially available. 

The principles of ion sources which use a primary ion beam for sputtering of solid material on sample surface in a high vacuum ion source of a secondary ion mass spectrometer or a sputtered neutral mass spectrometer are shown in Figure 2.30a and Figure 2.30b, respectively. Whereas in SIMS the positive or negative secondary ions formed after primary ion bombardment are analyzed, in SNMS the secondary sputtered ions are suppressed by a repeUer voltage and the sputtered neutrals which are post-ionized either in an argon plasma ( plasma SNMS ), by electron impact ionization ( e-beam SNMS ) or laser post-ionization are nsed for the surface analysis (for details of the ionization mechanisms see references 122-124). 

The superior corrosion performance and strong adhesion of the plasma coating system can be attributed to the coating properties and, more importantly, to the nature of interfacial chemistry. Two techniques were applied to study the surface and interfacial chemistry of the plasma coating system (1) in situ plasma deposition and XPS analysis and (2) in-depth profiling of sputtered neutral mass spectroscopy (SNMS). 

SNMS secondary neutral mass spectrometry sputtered neutral mass spectrometry... 

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