Sputter-initiated resonance-ionization

In other articles in this section, a method of analysis is described called Secondary Ion Mass Spectrometry (SIMS), in which material is sputtered from a surface using an ion beam and the minor components that are ejected as positive or negative ions are analyzed by a mass spectrometer. Over the past few years, methods that post-ion-ize the major neutral components ejected from surfaces under ion-beam or laser bombardment have been introduced because of the improved quantitative aspects obtainable by analyzing the major ejected channel. These techniques include SALI, Sputter-Initiated Resonance Ionization Spectroscopy (SIRIS), and Sputtered Neutral Mass Spectrometry (SNMS) or electron-gas post-ionization. Post-ionization techniques for surface analysis have received widespread interest because of their increased sensitivity, compared to more traditional surface analysis techniques, such as X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), and their more reliable quantitation, compared to SIMS. [Pg.559]

Sputter-Initiated Resonance Ionization Spectroscopy Surface Analysis by Resonant Ionization Spectroscopy Time-of-Flight Mass Spectrometer... [Pg.768]

Hi) Methods based on mass spectrometry Spark-source mass spectrometry Glow-discharge mass spectrometry Inductively coupled-plasma mass spectrometry Electro-thermal vaporization-lCP-MS Thermal-ionization mass spectrometry Accelerator mass spectrometry Secondary-ion mass spectrometry Secondary neutral mass spectrometry Laser mass spectrometry Resonance-ionization mass spectrometry Sputter-initiated resonance-ionization spectroscopy Laser-ablation resonance-ionization spectroscopy... [Pg.208]

Sputter-Initiated Resonance-Ionization Spectroscopy SIRIS... [Pg.215]

From the 1980s onwards, dedicated setups (and acronyms) have been developed, e.g., SALI (Becker and Gillen, 1984), sputter initiated resonance ionization spectrometry (SIRIS) (Parks, 1990), surface analysis by resonant ionization of sputtered atoms (SARISA, Pellin et al., 1989), and the Chicago-Argonne resonance ionization mass analysis (CHARISMA, Ma et al., 1995). The recent proliferation of commercial time-of-flight (TOP) secondary ion mass spectrometry (SIMS) instruments stimulates their conversion into SALI setups. [Pg.4682]

Some less common acronyms for laser SNMS are also used, such as sputter-initiated resonance ionization spectroscopy (SIRIS) [287] and surface analysis by laser ionization (SALI) [288]. [Pg.912]

GD Glow discharge SIRIS Sputter-initiated resonance ionization... [Pg.926]

As the preceding discussion describes thermal ionization from hot surfaces has limited scope A new and comprehensive method of ionization is evolving that appears capable of ionizing nearly every element in the periodic table (11 >38-42) Coupled with thermal vaporization processes and mass spectrometry resonance ionization has already been used in our laboratory to demonstrate ionization feasibility for more than one-fourth of the elements in the periodic table ( ) The current status of feasibility demonstration for atomic resonance ionization mass spectrometry in this and other labora torles Is summarized in Figure 1C (39-41>44-52) This summary Includes experiments performed with thermal and ion sputter-initiated techniques ... [Pg.10]