Augers

2 Auger Another popular technique for thin film analysis is called Auger electron spectroscopy (AES). In this technique, an energetic electron beam (up to 10 keV) is used to probe a surface. The energetic electron can 

---

The principal use of Auger spectroscopy is in the determination of surface composition, although peak positions are secondarily sensitive to the valence state of the atom. See Refs. 2, 82, and 83 for reviews. 

Experimentally, it is common for LEED and Auger capabilities to be combined the basic equipment is the same. For Auger measurements, a grazing angle of incident electrons is needed to maximize the contribution of surface... 

Fig. VIII-10. (a) Intensity versus energy of scattered electron (inset shows LEED pattern) for a Rh(lll) surface covered with a monolayer of ethylidyne (CCH3), the structure of chemisorbed ethylene, (b) Auger electron spectrum, (c) High-resolution electron energy loss spectrum. [Reprinted with permission from G. A. Somoijai and B. E. Bent, Prog. Colloid Polym. ScL, 70, 38 (1985) (Ref. 6). Copyright 1985, Pergamon Press.]...

ADAM Angular-distribution Auger microscopy [85] Surface atoms silhouetted by Auger electrons from atoms in bulk Surface structure... 

AES ARABS Auger electron spectroscopy [77, 112-114, 117] Angle-resolved AES [85, 115] An incident high-energy electron ejects an inner electron from an atom an outer electron (e.g., L) falls into the vacancy and the released energy is given to an ejected Auger electron Surface composition... 

PI, PIS Penning ionization [116, 118] Auger deexcitation of metastable noble-gas atoms 4. ... 

INS Ion neutralization An inert gas hitting surface is spectroscopy [147] neutralized with the ejection of an Auger electron from a surface atom Spectroscopy of Emitted Ions or Molecules Kinetics of surface reactions chemisorption... 

APS Appearance potential spectroscopy (see AES) Intensity of emitted x-ray or Auger electrons is measured as a function of incident electron energy Surface composition... 

AEAPS, SXAPS Auger electron APS, Soft x-ray APS Same as APS Same as APS... 

Electronic spectra of surfaces can give information about what species are present and their valence states. X-ray photoelectron spectroscopy (XPS) and its variant, ESC A, are commonly used. Figure VIII-11 shows the application to an A1 surface and Fig. XVIII-6, to the more complicated case of Mo supported on TiOi [37] Fig. XVIII-7 shows the detection of photochemically produced Br atoms on Pt(lll) [38]. Other spectroscopies that bear on the chemical state of adsorbed species include (see Table VIII-1) photoelectron spectroscopy (PES) [39-41], angle resolved PES or ARPES [42], and Auger electron spectroscopy (AES) [43-47]. Spectroscopic detection of adsorbed hydrogen is difficult, and... 

Mobility of this second kind is illustrated in Fig. XVIII-14, which shows NO molecules diffusing around on terraces with intervals of being trapped at steps. Surface diffusion can be seen in field emission microscopy (FEM) and can be measured by observing the growth rate of patches or fluctuations in emission from a small area [136,138] (see Section V111-2C), field ion microscopy [138], Auger and work function measurements, and laser-induced desorption... 

Electrons interact with solid surfaces by elastic and inelastic scattering, and these interactions are employed in electron spectroscopy. For example, electrons that elastically scatter will diffract from a single-crystal lattice. The diffraction pattern can be used as a means of stnictural detenuination, as in FEED. Electrons scatter inelastically by inducing electronic and vibrational excitations in the surface region. These losses fonu the basis of electron energy loss spectroscopy (EELS). An incident electron can also knock out an iimer-shell, or core, electron from an atom in the solid that will, in turn, initiate an Auger process. Electrons can also be used to induce stimulated desorption, as described in section Al.7.5.6. 

Figure Al.7.12. Secondary electron kinetic energy distribution, obtained by measuring the scadered electrons produced by bombardment of Al(lOO) with a 170 eV electron beam. The spectrum shows the elastic peak, loss features due to the excitation of plasmons, a signal due to the emission of Al LMM Auger electrons and the inelastic tail. The exact position of the cutoff at 0 eV depends on die surface work fimction.

A popular electron-based teclmique is Auger electron spectroscopy (AES), which is described in section Bl.25.2.2. In AES, a 3-5 keV electron beam is used to knock out iimer-shell, or core, electrons from atoms in the near-surface region of the material. Core holes are unstable, and are soon filled by either fluorescence or Auger decay. In the Auger... 

Powell C J, Jablonski A, Tilinin I S, Tanuma S and Penn D R 1999 Surface sensitivity of Auger-electron spectroscopy and x-ray photoelectron spectroscopy J. Eiectron Spec. Reiat. Phenom. 98-9 1... 

Powell C J 1994 Inelastic interactions of electrons with surfaces applications to Auger-electron spectroscopy and x-ray photoelectron spectroscopy Surf. Sc/. 299-300 34... 

Davis L E, MacDonald N C, Palmberg P W, Riach G E and Weber R E 1976 Handbook of Auger Eiectron Spectroscopy 2nd edn (Eden Prairie, MN Perkin-Elmer Corporation)... 

Egelhoff W F Jr 1990 X-ray photoelectron and Auger electron forward scattering a new tool for surface crystallography CRC Crit. Rev. Soiid State Mater. Sc/. 16 213... 

Fadley C S 1993 Diffraction and holography with photoelectrons and Auger electrons some new directions Surf. Sc/. Rep. 19 231... 

---