Auger electron spectrometers

SAM) and TEM. An Auger electron spectrometer with high spatial resolution imaging capability was developed especially for the detection of small particles and defects which might be present in the ULSI regime this enabled the inspection of wafers up to 200 mm in diameter [2.150]. 

FIGURE 7 Scientific research today often requires sophisticated equipment and computers. This chemist is using an Auger electron spectrometer to probe the surface of a crystal. The data collected will allow the chemist to determine which elements are present in the surface. 

Dedicated SEM instruments have resolutions of about 5 nm. Simple versions of SEM with micron resolution are often available on Auger electron spectrometers, for the purpose of sample positioning. The main difference between SEM and TEM is that SEM sees contrast due to the topology and composition of a surface, whereas the electron beam in TEM projects all information on the mass it encounters in a two-dimensional image, which, however, is of subnanometer resolution. 

Figure 3. Schematic of a conventional auger electron spectrometer...

Fig. 11. Experimental setup for the in situ detection of chemisorbed CO during catalytic combustion of CO on Pt using optical infrared-visible sum frequency generation (SFG) and mass spectrometry. A mode-locked Nd YAG laser system is used to provide the visible laser beam (second harmonic 532 nm) and to pump an optical parametric system to generate infrared radiation (wir) tunable with a pulse duration of 25 ps. MC monochromator, PMT Photomultiplier, AES Auger Electron Spectrometer, LEED Low Energy Electron Diffraction Spectrometer, QMS Quadrupole Mass Spectrometers for CO Thermal Desorption (TD) and CO2 production rate measurements.

This study focused on carbon deposits on alununa- and zeolite-supported cobalt catalysts and their effects on CO hydrogenadon. A thermogravimetiic flow system and Auger electron spectrometer were employed to characterize the carbon deposits. 

Catalyst surfaces were characterized in an Auger electron spectrometer (PHI model 548) with X-ray excitation from MgKa and electron gun. For Auger analysis the catalyst samples were pressed into a pallet of 1 mm in thickness and 12 mm in diameter. 

Figure 6 Schematic diagram of a recent Auger electron spectrometer design. (Reprinted from www.eaglabs.com with permission of the Evans Analytical Group.)...

ISO 17973/17974 - Medium-resolution/high-resolution Auger electron spectrometers - calibration of energy scales for elemental analysis ... 

Figure 7 Schematic diagram of the external bombardment mode of electron gas SNMS, including an Auger electron spectrometer for complemental analysis.

Atomic layer epitaxy, 117 Atomic level studies of CdTe(lOO), electrochemical digital etching, 115-123 Auger electron spectrometers, 106 Auger electron spectroscopy bisulfate anion adsorption on Au(l 11), Pt(l 11), and Rh(l 11) surfaces, 126-138 to monitor composition of acidified water surfaces, 106-114 underpotential deposition of lead on Cu(lOO) and Cu(lll), 142-154 use for bisulfate anion adsorption, 127... 

Palmberg PW, Bohn GK, Tracy JC (1969) High sensitivity Auger electron spectrometer. Appl Phys Lett 15 254... 

E 1217-05 Practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers... 

ISO 21270 2004 Surface chemical analysis - X-ray photoelectron and Auger electron spectrometers - Linearity of intensity scale... 

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