Intensity of Auger Peaks

X is the inelastic mean free path of the Auger electron  

9 is the take-off angle of the Auger electron measured from the surface normal. 

For a homogeneous sample with the detector perpendicular to the sample surface, Eq. (3-15) reduces to 

In order to obtain the measured intensity, one needs to correct Eqs. (3-15) and (3-16) for the transmission and the acceptance angle of the detector. 

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The total contribution to the Auger electron signal is then dependent upon the attenuation length (kM) in the matrix before being inelastically scattered, and upon the transmission efficiency of the electron spectrometer as well as the efficiency of the electron detector. Calculated intensities of Auger peaks rarely give an accuracy better than 50%, and it is more reliable to adopt an approach which utilises standards, preferably obtained in the same instrument. 

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