Auger spectrometer

Figure 8.22 Cylindrical analyser used in an Auger spectrometer...

AES analysis is done in one of four modes of analysis. The simplest, most direct, and most often used mode of operation of an Auger spectrometer is the point analysis mode, in which the primary electron beam is positioned on the area of interest on the sample and an Auger survey spectrum is taken. The next most often used mode of analysis is the depth profiling mode. The additional feature in this mode is that an ion beam is directed onto the same area that is being Auger analyzed. The ion beam sputters material off the surface so that the analysis measures the variation, in depth, of the composition of the new surfaces, which are being continu-... 

REELS spectrometers are in fact Auger spectrometers, so that elemental identifications can be made easily. 

REELS will continue to be an important surface analytical tool having special features, such as very high surface sensitivity over lateral distances of the order of a few pm and a lateral resolution that is uniquely immune from back scattered electron effects that degrade the lateral resolution of SAM, SEM and EDS. Its universal availability on all types of electron-excited Auger spectrometers is appealing. However in its high-intensity VEELS-form spectral overlap problems prevent widespread application of REELS. 

Auger spectra were obtained with a Perkin-Elmer PHI Auger spectrometer. Auger samples were removed under potential control, rinsed with water, and allowed to dry before mounting on sample holder. 

Fig. 2. Schematic diagram of a high resolution He time-of-flight spectrometer. N-nozzle beam source, SI, 2-skimmers, Al-5 - apertures, T - sample, G - gas doser, CMA - Auger Spectrometer, IG - ion gun, L - LEED, C -magnetically suspended pseudorandom chopper, QMA-detector, quadrupole mass analyzer with channeltron.

The energy of the primary electron beam was 2.5 keV and the energy of the Ar+ used in the depth profiles was 2 keV. The relative sensitivity factors were determined using pure standard samples and are presented in Table 14.1. Some samples were studied using an Auger spectrometer equipped with a retarding field analyser. The thickness of the films was... 

Phase composition, distribution character of the modifier particles on the surface of graphite particles has been analyzed using the X-ray studies, the Auger spectroscopy, electron microscopy and secondary ion mass spectrometry. The investigations have been performed using the following equipment DRON-4-07 X-ray diffractometer (filtered CoKa radiation), LAS-2000 Auger spectrometer (Riber, France), JSM-840 electron microscope (Japan). 

If the incident beam in an Auger spectrometer is rastcred over the specimen surface, the strength of a particular Auger transition can be used to generate an elemental map of the surface. SAM has the high surface sensitivity characteristic of AES and similar elemental sensitivity and spatial resolution (down to about 100 nm) [37]. 

The normal Auger spectrometer bombards metallic samples with an intense beam of (not necessarily monoenergetic) electrons, and the position of the signals is usually found by a device recording the differential quotient of the number of Auger electrons as a function of their Tin- Wagner (185) pointed out that they can also be observed in favourable cases with a photo-electron spectrometer like... 

The PHI ESCA/Auger spectrometer 549 was used for determining the composition of these films. This spectrometer was operated at pressures below 5 X 10-t> pm Hg. X-ray photoelectron spectra (XPS) were recorded using a pass energy of 50 or 100 eV and a Mg Ka X-ray source. XPS were calibrated with solidified TMT vapors and Sn02 as described by Kny et al.(8) The Sn 3 C Is... 

Figure 14.26 Schematic diagram of an Auger spectrometer, showing the electron gun source, an electron flood gun and an ion gun, along with a carousel for multiple samples. The vacuum system is not shown. [Courtesy of Physical Electronics USA, Inc. Eden Prairie, MN (www.phi.com).]...

W.A. Glaeser, D. Baer, M. EngeUiardt, In situ wear ejq)eriments in the scanning Auger spectrometer. Wear 162-164 (1993) 132-138. 

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