Analyzers Auger electron spectroscopy

In other articles in this section, a method of analysis is described called Secondary Ion Mass Spectrometry (SIMS), in which material is sputtered from a surface using an ion beam and the minor components that are ejected as positive or negative ions are analyzed by a mass spectrometer. Over the past few years, methods that post-ion-ize the major neutral components ejected from surfaces under ion-beam or laser bombardment have been introduced because of the improved quantitative aspects obtainable by analyzing the major ejected channel. These techniques include SALI, Sputter-Initiated Resonance Ionization Spectroscopy (SIRIS), and Sputtered Neutral Mass Spectrometry (SNMS) or electron-gas post-ionization. Post-ionization techniques for surface analysis have received widespread interest because of their increased sensitivity, compared to more traditional surface analysis techniques, such as X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), and their more reliable quantitation, compared to SIMS. 

Laser ionization mass spectrometry or laser microprobing (LIMS) is a microanalyt-ical technique used to rapidly characterize the elemental and, sometimes, molecular composition of materials. It is based on the ability of short high-power laser pulses (-10 ns) to produce ions from solids. The ions formed in these brief pulses are analyzed using a time-of-flight mass spectrometer. The quasi-simultaneous collection of all ion masses allows the survey analysis of unknown materials. The main applications of LIMS are in failure analysis, where chemical differences between a contaminated sample and a control need to be rapidly assessed. The ability to focus the laser beam to a diameter of approximately 1 mm permits the application of this technique to the characterization of small features, for example, in integrated circuits. The LIMS detection limits for many elements are close to 10 at/cm, which makes this technique considerably more sensitive than other survey microan-alytical techniques, such as Auger Electron Spectroscopy (AES) or Electron Probe Microanalysis (EPMA). Additionally, LIMS can be used to analyze insulating sam-... 

The apparatuses used for the studies of both ammonia synthesis emd hydrodesulfurization were almost identical, consisting of a UHV chamber pumped by both ion and oil diffusion pumps to base pressures of 1 x10 " Torr. Each chamber was equipped with Low Energy Electron Diffraction optics used to determine the orientation of the surfaces and to ascertain that the surfaces were indeed well-ordered. The LEED optics doubled as retarding field analyzers used for Auger Electron Spectroscopy. In addition, each chamber was equipped with a UTI 100C quadrupole mass spectrometer used for analysis of background gases and for Thermal Desorption Spectroscopy studies. 

The HREELS, Auger electron spectroscopy (AES) and thermal desorption spectrometry (TDS) experiments were carried out in a UHV chamber described previously.6 Briefly, the chamber was equipped with a HREELS spectrometer for vibrational analysis, a single-pass cylindrical mirror analyzer for AES measurements and a quadrupole mass spectrometer for TDS measurements. The HREELS spectra were collected in the specular direction with an incident energy of 3.5 eV and with a spectroscopic resolution of 50-80 cm-1. The TDS data were obtained by simultaneously monitoring up to 16 masses, with a typical heating rate of about 1.5 K s-1. 

Some of the techniques described in this chapter used most widely today are Auger electron spectroscopy, X-ray photoelectron spectroscopy, electron-probe micro-analysis, low energy electron diffraction, scanning electron microscope, ion scattering spectroscopy, and secondary ion mass spectroscopy. The solid surface, after liberation of electrons, can be analyzed directly by AES, XPS, ISS, and EPMA (nondestructive techniques), or by liberation of ions from surfaces using SIMS (involving the destruction of the surface). Apart from the surface techniques, reflectance-absorbance infrared (RAIR) spectroscopy has also been employed for film characterization (Lindsay et al., 1993 Yin et al., 1993). Some... 

The corrosion deposits can be analyzed by X-ray photoelectron spectroscopy and Auger electron spectroscopy. Some characteristics of the techniques are ... 

Specific spectroscopic techniques are used for the analysis of polymer surface (or more correctly of a thin layer at the surface of the polymer). They are applied for the study of surface coatings, surface oxidation, surface morphology, etc. These techniques are typically done by irradiating the polymer surface with photons, electrons or ions that penetrate only a thin layer of the polymer surface. This irradiation is followed by the absorption of a part of the incident radiation or by the emission of specific radiation, which is subsequently analyzed providing information about the polymer surface. One of the most common techniques used for the study of polymer surfaces is attenuated total reflectance in IR (ATR), also known as internal reflection spectroscopy. Other techniques include scanning electron microscopy, photoacoustic spectroscopy, electron spectroscopy for chemical analysis (ESCA), Auger electron spectroscopy, secondary ion mass spectroscopy (SIMS), etc. 

Fig. 1.5. Experimental setup of the high-frequency laser vaporization cluster ion source driven by a 100-Hz Nd Yag laser for the production of ion clusters, ion optics with a quadrupole deflector, and quadrupole mass Alter for size-selection and deposition the analysis chamber with a mass spectrometer for thermal desorption spectroscopy (TDS), a Fourier transform infrared spectrometer, a spherical electron energy analyzer for Auger electron spectroscopy (AES) for in situ characterization of the clusters [73]...

Surface analysis (AES/XPS) Electron spectroscopy for elemental analysis of surfaces, sensitive to as low as two atomic layers. Physical electronics model PHI-570 Auger Electron Spectroscopy/X-ray Photoelectron Spectroscopy System is a double pass cylindrical mirror energy analyzer with dual anode (Mg/Al) X-ray source and has a rapid sample introduction probe. It can detect elements at the first five to ten atomic layers of sample and detect all elements except H and He. 

Auger electron spectroscopy measurements were carried out using a PHI, single-pass, cylinderical mirror analyzer and an off-axis electron gun. The primary electron energy was 3.5 keV and the primary electron current was 9pA in all experiments. 

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