Auger electron spectroscopy characteristics

AES = auger electron spectroscopy APS = appearance potential spectroscopy CEELS = characteristic electron energy-loss spectroscopy ... 

The interaction of an electron with an atom gives rise to two types of X-rays characteristic emission lines and bremsstrahlung. The atom emits element-characteristic X-rays when the incident electron ejects a bound electron from an atomic orbital. The core-ionized atom is highly unstable and has two possibilities for decay X-ray fluorescence and Auger decay. The first is the basis for electron microprobe analysis, and the second is the basis of Auger electron spectroscopy, discussed in Chapter 3. 

The corrosion deposits can be analyzed by X-ray photoelectron spectroscopy and Auger electron spectroscopy. Some characteristics of the techniques are ... 

AES Auger Electron Spectroscopy Core-hole excitations are created, usually by 1-10 KeV incident electrons, and Auger electrons of characteristic energies are emitted through a two-electron process as excited atoms decay to their ground state. AES gives information on the nearsurface chemical composition. 

In the first place there is a host of surface spectroscopies. Some important ones have been discussed in sec. 1.7.II. Adamson gives a list of several tens of approaches and variants ). Most widely used are X-ray photoelectron spectroscopy (XPS), also called electron spectroscopy for chemical analysis (ESCA), Auger electron spectroscopy (AES), and secondary ion mass spectroscopy (SIMS) and. to a lesser extent, ion scattering spectroscopy (ISS). The main characteristics of these techniques have been collected in table 1.7.4. Other techniques may be more widely used in certain areas. For example, XPS is very popular in heterogeneous catalysis. 

Auger Electron Spectroscopy (AES) — a keV electron beam is directed at a surface. Core electrons are ejected from atoms of the solid. Electrons with smaller binding energies fall into the core electron holes. The energy thus released can emit a low energy electron. The energy spectrum of Auger electrons is characteristic of the elemental identity of the respective atoms. 

In Auger electron spectroscopy (AES) [31], the intensity of electrons scattered from a surface is measured as a function of their kinetic energy. Characteristic peaks in the energy distribution identify the elements present within the near surface region. AES is most often used in conjunction with LEED to characterise the composition and atomic structure of a surface or film. Knowing both the periodicity and relative composition of an overlayer is indispensable to deducing its atomic structure. 

Auger electron spectroscopy (AES) and/or X-ray photoelectron spectrosocpy (XPS) are the most used techniques for elemental quantification, since they measure low/medium kinetic energy electrons which are characteristic of the... 

Auger electron spectroscopy is used mainly for determining the elemental composition of the outer layers of a solid. Each element, when excited by the ionization of an inner electron level, emits Auger electrons with energies characteristic of that element and virtually independent of the chemical environment of the atom concerned. 

The films and devices were characterized by inductive-coupled plasma spectrometry (ICP), Auger electron spectroscopy (AES), X-ray diffraction, electron-probe microanalysis (EPMA), current-voltage characteristics, and spectral response. 

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