Scanning Auger electron spectroscopy

Scanning Auger Electron Spectroscopy (SAM) and SIMS (in microprobe or microscope modes). SAM is the most widespread technique, but generally is considered to be of lesser sensitivity than SIMS, at least for spatial resolutions (defined by primary beam diameter d) of approximately 0.1 im. However, with a field emission electron source, SAM can achieve sensitivities tanging from 0.3% at. to 3% at. for Pranging from 1000 A to 300 A, respectively, which is competitive with the best ion microprobes. Even with competitive sensitivity, though, SAM can be very problematic for insulators and electron-sensitive materials. 

Taking the same approach as that described above, Chianelli et al. [72] doped a single crystal of MoS2 with cobalt and equilibrated it at high temperature. Chemical maps made with scanning Auger electron spectroscopy at a spatial... 

AES, SAES [(scanning) Auger electron spectroscopy] 2 nm 20 nm composition of surface and surface films, high lateral information... 

A technique which has been used to measure surface diffusion rates is scanning Auger electron spectroscopy, which can follow adsorbate diffusion. A particular Auger transition of the adsorbate under investigation is used as a monitor of relative concentration versus distance scanned across the surface. Profiles are recorded after heating periods to observe the change in concentration profile as a function of time and temperature. 

Micrometer-Scale Imaging of Native Oxide on Silicon Wafers by Using Scanning Auger Electron Spectroscopy... 

Ca has been shown by Auger electron spectroscopy [162] and X-ray photoelectron spectroscopy [52] to remain in the oxidized state. Chemisorption measurements [163] and X-ray powder diffraction studies [164] show that CaO is segregated to the space between the Fe crystallites during the reduction. The segregation of Ca to the surface has been demonstrated by scanning Auger electron spectroscopy[52, 209-211]. 

The segregation of K to the surface has been demonstrated by chemisorption measurements [207,220], by scanning Auger electron spectroscopy [52,209-211], by X-ray photoelectron spectroscopy [208], and by electron microscopy [92]. Single crystal studies of K overlayers on Fe(l 10) demonstrate that K is not a structural promoter [221] and that K may even reduce the ability of A1 to disperse Fe [221]. 

The migration of K to the surface of the reduced catalyst [40] has been demonstrated by energy dispersive X-ray analysis [28], by field iron mass spectroscopy [222, 223], by chemisorption of CO, CO2, N2and H2 [207, 220] by scanning Auger electron spectroscopy [209-211], and by high-voltage electron microscopy [224]. 

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