Scanning Auger Microscopy SAM

If an incident electron beam of sufficient energy for AES is rastered over a surface in a manner similar to that in a scanning electron microscope (SEM), and if the analyzer is set to accept electrons of Auger energies characteristic of a particular element, then an elemental map or image is again obtained, similar to XPS for the Quantum 2000 (Sect. 2.1.2.5). 

This is illustrated in Eig. 2.30 [2.167]. The surface was that of a fractured compact of SiC to which horon and carhon had been added to aid the sintering process. The aim of the analysis was to establish the uniformity of distribution of the additives and the presence or absence of impurities. The Auger maps show not only very non-uniform distribution of boron (Eig. 2.30a) but also strong correlation of boron with sodium (Eig. 2.30c), and weaker correlation of boron with potassium (Eig. 2.30b). Point analyses for points A and B marked on the images reveal the presence of sulfur and cal- 

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Yes, in combination with ion-beam sputtering 300 A for Auger analysis, even less for imaging Yes, called Scanning Auger Microscopy, SAM Sample requirements Vacuum-compatible materials Main use Elemental composition of inorganic materials... 

Finally, the surface and bulk compositions of these fibers can vary dramatically. Figures 5 and 6 show the scanning Auger microscopy (SAM) profiles of SGN and HPZ ceramic fibers, respectively. Because the fiber-matrix interfaces are critical in many applications (2), this type of characterization of fiber surface composition and chemistry must be carried out. 

Formation of nanopores are directly observed by scanning Auger microscopy (SAM) data for that surface region [5]. From SEM and SAM images taken from same area, after SiN nanonetwork deposition, nanometer scale pores without Si were observed, and the area between GaN islands was indeed covered by SiN. Meanwhile, the density of nanopores was probably much larger than nucleation density. 

Figure 9. Scanning auger microscopy (SAM) maps and surface profile trace for PTFE wear film on an Iridium substrate. Load, 2 newtons temperature, 24 C sliding speed, 0.1 mm per second.

Scanning Auger microscopy SAM to 1 pm depth profiles excitation conductors ... 

Scanning Auger microscopy (SAM) has better, more general sensitivity for a wide variety of adsorbates, but has somewhat poorer spatial resolution ( 50 nm). This technique has been employed very effectively with a one-dimensional initial step suitable for analysis in the Boltzmaim-Matano framework [83Sull]. This approach is particularly suited for obtaining the concentration dependence of D. Again, however, electron beam damage can be an issne. 

The primary electron gun, electron optical devices, deflection plates and the micro channel plate Auger electron detector are movmted coaxially with the cylinders of the analyzer. The focal point of the analyzer is coincident with the focal point of the primary electron beam. Scanning Auger microscopy (SAM) is... 

In Scanning Auger Microscopy (SAM), a focussed electron beam is scanned across a surface to produce Auger electrons and the results are presented as a map on X and Y axes showing the surface distribution of a particular element. Other workers [49-52] have used SAM to determine the distribution of oxygen on the surface of carbon fibers and the structure of the interface in carbon fiber composites [53]. 

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