Auger electron spectroscopy line

Fig. 12. Auger electron spectroscopy (AES) sputter-depth profile of CAA-treated titanium after various exposure.s in vacuum (a) as anodized, (b) 450°C for 1 h, and (c) 7(X)°C for 1 h. The sputter etch rate is 1.5 nm/min. The line indicates the original interface. The arrow denotes oxygen diffused into the substrate. Adapted from Ref. [51].

The interaction of an electron with an atom gives rise to two types of X-rays characteristic emission lines and bremsstrahlung. The atom emits element-characteristic X-rays when the incident electron ejects a bound electron from an atomic orbital. The core-ionized atom is highly unstable and has two possibilities for decay X-ray fluorescence and Auger decay. The first is the basis for electron microprobe analysis, and the second is the basis of Auger electron spectroscopy, discussed in Chapter 3. 

NIST X-ray Photoelectron Spectroscopy Database http //srdata.nist. gov/xps/. 2007. Database of many core photoelectron and Auger-electron spectral lines, currently containing over 22,000 entries. Free access. 

The distinctive features of micro-structure of grains and grain boundaries were established by SEM, EDXA, XPS and Auger electron spectroscopy. The surface of freshly obtained splits of the ferrite was analyzed. SEM and EDX analyses were conducted on LEO 1420 microscope. XPS investigation was carried out on a ES-2410 spectrometer line C Is with Eb = 284.6 eV was used for calibration. Auger electron spectra were recorded on a Perkin Elmer PH-660 spectrometer. Phase composition of the samples was established by XRD analysis of thoroughly grinded powder by a DRON-2.0 diffractometer with Ni-fdtered Co Ka-radiation (X = 0.178896 nm). 

Amongst the main experimental techniques that have been deployed to determine the composition and structure of binary alloy surfaces. Auger electron spectroscopy (AES), XPS, FEED and ISS feature most prominently. There is now a very large literature describing the results obtained, which, after some early inconsistencies had been resolved, are now generally in line with theoretical... 

Figure 12.11 Floating of a Ru(OOOl) surface alloy observed by the Auger electron spectroscopy. Spectra obtained after each of the four stages of surface modification are compared pairwise. The gray lines are thicker to make the black lines visible in the pairwise...

The surface composition of the uncoated, patterned wafer was analyzed by Auger spectroscopy. Line quality and surface detail at each key process step were examined by scanning electron microscopy using samples overcoated with lOOA of a platinum/gold alloy. 

Figure 7.13 Chart of principal Auger electron energies of KLL, LMM and MNN lines (Reproduced with permission from J.F. Watts, An Introduction to Surface Analysis by Electron Spectroscopy, Oxford University Press, Oxford. 1990 Royal Microscopy Society.)...

The energies involved in Auger spectroscopy are similar in all respects to those of ESC A, since the same atomic shells are involved. A graphical plot of Auger electron energies is shown in Fig. 14.23 and tabulated values of the prominent lines are available in the literature. 

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