Auger electron spectrometry

Balsenc LR (1980) Sulfur Interaction with Surfaces and Interfaces Studied by Auger Electron Spectrometry. 39 83-114... 

As mentioned already, many surface-analysis techniques are available nowadays. In the opinion of some specialists in this field [36, 37], four of these are greater in importance X-ray photoelectron spectrometry (ESCA), Auger electron spectrometry (AES), secondary-ion mass spectrometry (SIMS), and low-energy ion scattering spectrometry (ISS). 

Auger electron spectrometry (AES), reported by Auger in 1923 [40], is also a valuable technique for analysing surfaces. The technique is somewhat similar to ESCA, measuring electrons emitted from a surface as a result of electron bombardment. In both cases, the sampling depth is ca. 20A. Coupling this technique with scanning electron microscopy (SEM) produced a tandem (AES-SEM) technique which has proved extremely productive. 

Examples of conventional instrumentation used for electron-excited X-ray emission spectroscopy and Auger electron spectrometry are shown in Figures 2 and 3 respectively. Details concerning the instrumentation may be found elsewhere (25-29). 

Barrier layers for Cu metallization in surface acoustic wave (SAW) devices, which are increasingly used in the information technique and telecommunications industry, have been investigated by SIMS depth profiling in comparison to AES (Auger Electron Spectrometry).125 Development trends in SAW devices focus on smaller structures, higher input power or higher frequency. Two Cu metallization systems (of 150 nm thickness) on a LiNb03 substrate with different barrier layers ... 

Ion scattering spectrometry (ISS) Secondary ion mass spectrometry (SIMS) Auger electron spectrometry (AES) X-ray photoelectron spectrometry (XPS)... 

W. Mehlhorn, Auger-electron spectrometry of core levels of atoms, in B. Crasemann (Ed.), Atomic Inner-Shell Physics, Plenum, New York, 1985. 

Due to relativistic effects important for the inner shells of atoms, the deep ntf shells split in energy according to the j value from the spin-orbit coupling j = t + 1/2. Therefore, deep inner shells are classified by their nfj values. Frequently, in X-ray emission and Auger electron spectrometry, the shell index... 

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