Gold, Auger electron maps

Figure 18. Secondary electron image (a) and Auger electron maps for Nickel (b), oxygen (c), and gold (d) from Au/Ni/Cu metallization following heating. (Reproduced with permission. Copyright Perkin-Elmer Corporation.)...

Fig. 31. Scanning electron micrograph (SEM) and scanning Auger element maps for an array of four strips of gold numbers 1,3,6, and 8) and four of aluminum/alumina (numbers 2, 4, 5, and 7) on a silicon nitride substrate that was exposed to a mixture of HS(CH2),, C1 and CF3(CF2)8C02H in isooctane. The SEM and element maps are for the array viewed from above the schematic of the device (the height of the strips is not drawn to scale) is a side view [175]...

Figure 14.31 Auger element maps of an integrated circuit, showing the distribution of oxygen, gold, and molybdenum on the surface. [Courtesy of Physical Electronics USA, Inc. Eden Prairie, MN (www.phi.com).]...

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