Micromachining

Welter O, Bayer T and Greschner J 1991 Micromachined silicon sensors for scanning force microscopy J. Vac. Sc/. Technol. B 9 1353... [Pg.1723]

Otlier lithographical means include micromachining [175], photopatteming [176] or electron beam patterning [1771, which have been demonstrated on alkanetliiolate/Au SAMs, alkanetliiolate and organo-siloxane on Si and Ti and alkanetliiolates on GaAs. [Pg.2626]

Eig. 17. Cross-sectional schematic of a microbolometer photodetector. Micromachining is used to constmct small, very low mass detectors. The dimension... [Pg.436]

Electrically Tunable Micromachined Fabry-Perot Interferometer The... [Pg.1310]

Fabry-Perot interferometer is an optical resonator consisting of two parallel mirrors. Fabry-Perot interferometers can be made by silicon bulk microma-chining." " Silicon surface micromachining is also a suitable technique for making interferometers for infrared wavelengths. [Pg.1310]

FIGURE 13.55 (sensor based on an elecmcalty tunable micromachined Eabry-Perot interferomeced and (b) the siitfcing of the pass band controlled by the tuning voltage. ... [Pg.1312]

Figure 13.55 shows the principle of a gas sensor based on an electrically tunable micromachined Fabry-Perot interferometer, and the shifting ol the pass band controlled by rhe tuning voltage. [Pg.1312]

Jerman, J. H., and D. ]. Clift. Miniature Fabry-Perot Interferometers Micromachined in Silicon for the Use in Optical Fiber WDM Systems. Transducers 91 Conference, Digest of Technical Papers (1991), pp. 372-375. [Pg.1316]

Blomberg, M., A. Torkkeli, A. Lehto, C. Helenelund, M. Viitasalo. Electrically Tuneable Micromachined Fabry-Perot Interferometer in Gas Analysis. Phystca Scripta T69 (1997), pp. 119-121. [Pg.1316]

Rai-Choundhury, P. ed.. Handbook of Microlithography, Micromachining and Microfabrication. Vol. 1 microlithography, SPIE Optical Engineering Press, Washington,... [Pg.181]

Fig. 2.71a-c Bulk micromachining etch profiles. Reprinted from Kandlikar and Grande (2002) with permission... [Pg.85]

Yoon DS, Lee Y-S, Lee Y, Cho HJ, Sung SW, Oh KW, Cha J, Lim G (2002) Precise temperature control and rapid thermal cycling in a micromachined DNA polymerase chain reaction chip. J Micromech Microeng 12 813-823... [Pg.98]

The dimension of machine elements has been reduced continuously in recent years with the advance of micromachining technology, and the separation between surfaces in rela-... [Pg.74]

A very recent example of the first case is presented by Vilaseca et al. [71] where an LTA coating on a micromachined sensor made the sensor much more selective to ethanol than methane. Moos et al. [72, 73] report H-ZSM5 NH3 sensor based on impedance spectroscopy using the zeolite as active sensing material. At elevated temperatures (>673 K) NH3 still adsorbs significantly in contrast to CO2, NO,... [Pg.227]

The importance of surface characterization in molecular architecture chemistry and engineering is obvious. Solid surfaces are becoming essential building blocks for constructing molecular architectures, as demonstrated in self-assembled monolayer formation [6] and alternate layer-by-layer adsorption [7]. Surface-induced structuring of liqnids is also well-known [8,9], which has implications for micro- and nano-technologies (i.e., liqnid crystal displays and micromachines). The virtue of the force measurement has been demonstrated, for example, in our report on novel molecular architectures (alcohol clusters) at solid-liquid interfaces [10]. [Pg.1]

Tonkovich, A. L. Y, Roberts, G. L, Fabrication of a stainless steel microchannel microcombustor using a lamination process, in Proceedings of the SPIE Gonference on Micromachined Devices and Gompo-nents IV, pp. 386-392 (September 1998),... [Pg.119]

Giu, T, Eang, j.. Maxwell, J., Gardner, J., Besser, R., Elmore, B., Micromachining of microreactor for dehydrogenation of cyclohexane to benzene, in Proceedings of the 4th International Conference on Microreaction Technology, IMRET 4, p. 488... [Pg.122]

Kikuchim, Y., Chun, K., Fujita, H., Micromachined straight-through silicon microchannel array for monodispersed microspheres, in Matlosz, M., Eheeeld,... [Pg.123]

Tu, J. K., Huen, T., Szema, R., Ferrari, M., Filtration of sub-100 nm particles using a bulk-micromachined, direct-bonded silicon filter, J. Biomed. Microdevices 1 (1999) 113-119. [Pg.249]

The design and fabrication of some gas-phase micro reactors are oriented on those developed for chip manufacture in the framework of microelectronics, relying deeply on silicon micromachining. There are obvious arguments in favor the infrastructure exists at many sites world-wide, the processes are reliable, have excellent standards (e.g. regarding precision) and have proven mass-manufacturing capability. In addition, sensing and control elements as well as the connections for the whole data transfer (e.g. electric buses) can be made in this way. [Pg.275]

Standard silicon micromachining processes were applied. The starting material was a 100 mm silicon (110) orientation wafer covered with thermal oxide. Stand-... [Pg.278]

Schwesinger, W., Erank, T, A static micromixer built up in silicon, in Proceedings of Micromachining and Microfabrication, pp. 150-155, SPIE,... [Pg.569]

When the development of a scientific field expands, the need for handbooks arises, wherein the information that appeared earlier in journals and conference proceedings is systematically and selectively presented. The sensor and actuator Held is now in this position. For this reason, Elsevier Science took the initiative to develop a series of handbooks with the name "Handbook of Sensors and Actuators" which will contain the most meaningful background material that is important for the sensor and actuator field. Titles like Fundamentals of Transducers, Thick Film Sensors, Magnetic Sensors, Micromachining, Piezoelectric Crystal Sensors, Robot Sensors and Intelligent Sensors will be part of this series. [Pg.406]

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