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Discrete surface micromachining

Fig. 5.3.12 Working design of a discrete accelerometer made by silicon surface micromachining the seismic mass forms the movable inner electrode and is suspended on two springs the movable capacitive fingers are interdi-gitated between the outer electrodes 1 and 2, which have fixed (immovable) capacitive fingers... Fig. 5.3.12 Working design of a discrete accelerometer made by silicon surface micromachining the seismic mass forms the movable inner electrode and is suspended on two springs the movable capacitive fingers are interdi-gitated between the outer electrodes 1 and 2, which have fixed (immovable) capacitive fingers...
See other pages where Discrete surface micromachining is mentioned: [Pg.103]    [Pg.103]    [Pg.105]    [Pg.107]    [Pg.107]    [Pg.109]    [Pg.111]    [Pg.113]    [Pg.115]    [Pg.117]    [Pg.119]    [Pg.121]   


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