Electrochemical micromachining setup

Figure 12 (a) Experimental setup for electrochemical micromachining. (See text for... 

Sketch of the experimental setup and principle of electrochemical micromachining with ultrashort pulses. RE and CE are abbreviations for reference and counter electrode, respectively. 

Silicon Micromachining, Fig. 4 Schematic drawing of experimental setup for electrochemical etching of p-type (100) silicon. The etching stops at p-type and n-type silicon interface... 

A three-dimensional modular setup for a miniaturized analysis system for flowing streams is presented The system uses silicon micromachined pumps and flow manifolds in combination with electrochemical sensors or optical detection Applications range from simple ion concentration measurements with ISFETs to a multi-step chemical analysis of phosphate Miniaturization of the flow systems leads to a substantial reduction in reagent consumption... 

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