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Electrochemical micromachining applications

IV. LOCALIZED ANODIZATION AND ELECTROCHEMICAL MICROMACHINING APPLICATIONS AND DEVICES... [Pg.231]

M Navarro, JM Lopez-Villegas, J Samitier, JR Morante, J Bausells, A Merlos. Electrochemical etching of porous silicon sacrificial layers for micromachining applications. J Micromech Microeng 7 131-132, 1997. [Pg.166]

M. Datta, L.T. Romankiv, Application of chemical and electrochemical micromachining in the electronic... [Pg.24]

X. Lu, Y. Leng, Electrochemical micromachining of titanium surfaces for biomedical applications, J. Mater. Process. Technol. 169 (2005) 173-178. [Pg.184]

An interesting application of mass transport controlled pit growth is found in electrochemical micromachining. When anodically dissolving a metal such as titanium... [Pg.326]

Shapley JDL, Barrow DA (2001) Novel patterning method for the electrochemical production of etched silicon. Thin Solid Films 388(1-2) 134-137 Steiner P, Lang W (1995) Micromachining applications of porous silicon. Thin Solid Films 255(l-2) 52-58... [Pg.413]

Chapter 8 outlines how an electrochemical discharge micromachining facility can be built. Finally, Chapter 9 provides an outlook on new possible applications. [Pg.12]

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See also in sourсe #XX -- [ Pg.169 ]



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