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Silicon-based micromachined sensor

Cutting-edge Silicon-based Micromachined Sensors for Next Generation Household Appliances... [Pg.198]

Mass-produced cantilever sensors, however, have the potential to satisfy the conditions of selectivity, sensitivity, miniature size, low power consumption, and real-time operation [5, 6], Microcantilevers are micromachined from silicon or other materials and can easily be fabricated in multiple-element arrays. They resemble miniature diving boards measuring 100 to 200 pm long by about 20 to 40 pm wide by 0.3 to 1 pm thick and having a mass of a few nanograms. Their primary advantage originates from their sensitivity, which is based on the ability to detect their motion with subnanometer precision. [Pg.246]

U. Schnakenberg, W. Benecke, and B. Lochel, NH OH-based etchants for silicon micromachining. Sensors Actuators A 2 - 1031, 1990. [Pg.480]

R.M. Langdon, Micromachining of silicon for sensors, Proc. NATO ASI on Novel Si-Based Technologies 1989, 143-172. [Pg.90]

Most silicon accelerometers are based on a micromachined variable capacitance element (g-cell) that is converted to a voltage using a C-V converter and then amplified, filtered, and buffered to provide an analog output as shown in Fig. 7.1.4. To date, open-loop implementations for capacitive read-out circuits are more widely employed than closed-loop systems, primarily as a result of the stability of such systems [16]. Interface electronics for micromachined sensors depend not only upon the transduction technique (input specification) and the product requirements (output specification) but also on the packaging approach, as parasit-ics are introduced when a multiple-die packaging technique is used. [Pg.276]

Microfabrication and micromachining techniques have also been used in the manufacture of electrochemical sensors. This includes po and pco sensors. Zhou et al [9] describe an amperometric CO2 sensor using microfabricated microelectrodes. In this development, silicon-based microfabrication techniques are used, including photolithographic reduction, chemical etching, and thin-film metallization. In Zhou s study, the working electrodes are in the shape of a microdisk, 10 pm in diameter, and are connected in parallel. In recent years, silicon-based microfabrication techniques have been applied to the development of microelectrochemical sensors for blood gases, i.e. P02. Pcoj and pH measurements. [Pg.430]

Recently Micro Electro-Mechanical Systems (MEMS) have been emerging as sensor platform for the development of sensors with extreme high sensitivity [8-14]. Micromachined silicon cantilevers are the simplest MEMS sensors that can be micromachined and mass-produced. Microcantilever sensor technology is an upcoming sensing technique with broad applications in chemical, physical, and biological detection. With their compactness and potential low cost, detection techniques based on silicon-based cantilevers provide a path for the development of miniaturized sensors. [Pg.250]

Lorenzelli, L., Benvenuto, A., Adami, A. et al. (2005) Development of a gas chromatography silicon-based microsystem in clinical diagnostics. Biosens Bioelectron, 20 (10), 1968-1976. Zampolli, S., Ehni, I., Stiirmann J. et al. (2005) Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column. Sens Actual B, 105 (2), 400-406. Bessoth, F.G., Naji, O.P., Eijkel, J.C.T. and Manz, A. (2002) Towards an on-chip gas chromatograph the development of a gas injector and a dc plasma emission detector. J Anal Atom Spectrom, 17 (8), 794-799. [Pg.279]

Electrochemical polymerization tirray of chemiresistive sensors Carbon-polymer composites silicon-based micromachined array of chemiresistive gas sensors Polymer films array of QCM-based sensors ... [Pg.145]

They operate as drive, amplitude control of the drive, detectors for the oscillation nodes, and as actuators to keep the nodes in place. The principle enables a complete self-test by simulating a yaw rate via the piezoactuators of the closed loop. A yaw-rate sensor based on the principle of a vibrating cylinder is used in VDC systems (Fig. 7.2.18). This principle has been used in a similar way in silicon micromachining and is used in a yaw-rate sensor for VDC [9]. [Pg.312]

Zampolli and coworkers have developed a selective hybrid microsystem based on GC to enhance indoor air quality monitoring applications such as CO and NO2 [41]. In the miniaturized GC, a solid-state sensor acts as the detector along with a silicon micromachined packed GC column, a zero grade air unit, a minipump, and a minivalve. It was possible to detect benzene, toluene, and m-xylene in both synthetic and real indoor air down to 5 ppb. [Pg.184]

It then addresses the micro-hotplates concept that has led to the development of different types of micromachined gas sensor devices. The different reahzations of micromachined semiconductor gas sensors are presented thin- and thick-film metal-oxide, field effect, and those using complementary metal-oxide semiconductors (CMOSs) and silicon-on-insulator (SOI) technologies. Finally, recent developments based on gas sensitive nanostructures, polymers, printing and foil-based technologies are highlighted. [Pg.220]


See other pages where Silicon-based micromachined sensor is mentioned: [Pg.427]    [Pg.149]    [Pg.837]    [Pg.356]    [Pg.322]    [Pg.332]    [Pg.348]    [Pg.355]    [Pg.220]    [Pg.255]    [Pg.186]    [Pg.238]    [Pg.656]    [Pg.167]    [Pg.168]    [Pg.164]    [Pg.4]    [Pg.118]    [Pg.390]    [Pg.87]    [Pg.208]    [Pg.6]    [Pg.191]    [Pg.270]    [Pg.331]    [Pg.429]    [Pg.221]    [Pg.226]   
See also in sourсe #XX -- [ Pg.198 , Pg.199 , Pg.200 , Pg.201 , Pg.202 , Pg.203 , Pg.204 , Pg.205 , Pg.206 , Pg.207 , Pg.208 , Pg.209 ]




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