Micromachining, description

Determination of the temperature distribution induced by laser, electron, or plasma beam sources is relevant in operations such as surface transformation hardening of metals, drilling, cutting, annealing, shaping, and micromachining. Descriptions of beam-generating devices as well as discussions of applications are available [7-15]. 

Let us first start with the description of the bubble diffusion region that is directly accessible to visual observations. The important parameters that characterise the bubble diffusion region are the gas void fraction e and the geometrical shape of the bubble layer, both of which are dependent on the cell geometry. We will restrict the discussion to the case that is most representative of micromachining with electrochemical discharges the case of a thin electrode dipped inside an electrolyte. The electrochemical cell is much larger than the electrode. 

Lucklum and Hauptmann, who have made significant contributions to the development of the theory and applications of the QCM, address the future of this field in a recent review with 235 references [17]. To quote In this review we give an overview of recent developments in resonant sensors including micromachined devices and also list recent activity relating to the (Bio)chemical interface of acoustic sensors. Major results from theoretical analysis of quartz crystal resonators, descriptive for all acoustic microsensors are summarized and non-gravimetric contributions to the sensor signal from viscoelasticity and interfacial effects are discussed. ... 

Zemel J (1988) Theoretical description of gas film interaction on SnOv. Thin Sohd Films 163 89-195 Zhang H, Pang W, Kim ES, Yu H (2010) Micromachined silicon and polymer probes integrated with film-bulkacoustic-resonator mass sensors. J Micromech Microeng 20 125008... 

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