Laser micromachining

Ran, Z. L. Rao, Y. J. Liu, W. J. Liao, X. Chiang, K. S., Laser micromachined Fabry Perot optical fiber tip sensor for high resolution temperature independent measurement of refractive index, Opt. Express 2008, 16, 2252 2263... 

Cheng, Y. Tsai, H. L. Sugioka, K. Midorikawa, K., Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining, Appl. Phys. A. 2006, 85, 11 14... 

Figure 5.2. Schematic representation of an excimer laser micromachining system.

Initially, the reactor was to be built using silicon wafers, 92 but more recent efforts have focused on a stainless steel reactor. The reformer, 7.5 x 4.5 x 11.0 cm (371 cm ), houses up to 15 stainless steel plates (0.5 mm thick) with chemically etched microchannels and heating cartridges. Conventional and laser micromachining techniques were used to fabricate the reformer body. The microchannel dimensions are 0.05 x 0.035 x 5.0 cm . The reactor inlet was carefully designed to allow uniform flow conditions. ... 

Klank, H., J. P. Kutter, and O. Geschke. C02-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems. Lab on a Chip 2, 242-246 (2002). 

Excimer Laser Micromachining [132, 133] is a technique based on laser ablation. Currently, this process can routinely ablate vias as small as 6 pm in diameter in polymers, glass, ceramics and metals. The minimum size of the features that this method can produce is limited by diffraction and by heat/mass transport. Commercial instruments and services are available from a number of companies (for example, Resonetics, Itek). 

Kancharla, V.V., Chen, S.C., Fabrication of biodegradable polymeric microdevices using laser micromachining. Biomed. Microdevices 2002, 4(2), 105-109. 

Laser ablation is a process in which an intense btast of energy is used to remove a small amount of material fi om the surface [19]. It is the basis for excimer laser micromachining. It can be used with a variety of different materials, ranging from silicon to polymers and ceramics. Feature sizes in the low micrometer range can be realized. The advantage of laser ablation is the... 

Laser micromachining is automatic, fast, and cheaper than hot embossing [29], Because it creates no or very little thermal effects, it allows a very clean cut surface [24], The direct writing of subsurface features with multi-photon absorption is unique among available nano and micro fabrication methods. 

Giridhar MS, Seong K, Schulzgen A, Khulbe P, Peyghambarian N, Mansuripur M. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices. Appl Opt 2004 43 4584-9. 

Keywords Ablation Dielectrics Femtosecond laser Micromachining Polymers... 

S.H. Chan, N.-T. Nguyen, Z. Xia, and Z. Wu, Development of a polymeric micro fuel cell containing laser-micromachined flow channels. Journal of Micromechanical Microengineering, 15 (2005) 231-236. 

K.K.C. Lee, N.R. Munce, T. Shoa, L.G. Charron, G.A. Wright, J.D. Madden, and V.X.D. Yang, Fabrication and characterization of laser-micromachined polypyrrole-based artificial muscle actuated catheters. Sens. Actuat. A, 153 (2), 230-236 (2009). 

N. Rizvi, Femtosecond laser micromachining Current status and applications, Riken Review, 50,... 

R. Gattass and E. Mazur, Femtosecond laser micromachining in transparent materials. Nature Photonics,... 

Laser micromachining is one of many commonly used methods for the formation of microfluidic devices. Laser micromachining has direct write capabilities, can be used to form high-aspect-ratio channels and features, and can be used for... 

Two fundamental modes of laser micromachining can be differentiated based on the temporal width of the laser pulses used. Ultra-short pulses provide rapid bursts of photons that interact with a material in time frames that are shorter than timescales of thermal processes and are less than 10 ps in width. Therefore, in ultra-short laser pulses, dissociative processes... 

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