Electrochemical micromachining product

The most suitable, successful etch-stop techniques are electrochemical etch stop (ECES), achieved by reverse biasing a pn junction [12, 15], and high boron dose etch stop [7, 16], which is explained below. Other etch-stop techniques have been reported [17], but they have not yet been used in mass production. A detailed review of etch-stop techniques for micromachining is given in [18]. 

On-line measurements of medium components and enzymic products were reported by Spielman et al (1992). A micromachined immobilized column with electrochemical detection for glucose was reported by Murakami et al... 

Shapley JDL, Barrow DA (2001) Novel patterning method for the electrochemical production of etched silicon. Thin Solid Films 388(1-2) 134-137 Steiner P, Lang W (1995) Micromachining applications of porous silicon. Thin Solid Films 255(l-2) 52-58... 

The overall goal of this book is to provide a general overview of microfluidic fuel cell and battery technology in support of future research, product development, and commerciahzation activities. The focus is on emerging microfluidic fuel cell and battery devices that utilize membraneless electrochemical flow cell architectures to produce electrical power. The scope is limited to membraneless cells, as the elimination of the membrane provides compatibility with planar microfabrication and micromachining methods that are well suited for production of low-cost miniaturized power sources. However, membraneless cells require innovative microfluidic engineering solutions, which will be addressed in this work. 

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