Electrochemical micromachining

Electrochemical micromachining and surface microstructuring based on porous-type anodization of patterned films... [Pg.1]

Electrochemical micromachining (EMM) is a technique designed to generate patterned microstructures in metals and alloys [ 145]. Microfabrication by EMM may involve maskless or through-mask dissolution. Maskless EMM uses the... [Pg.15]

West et al. [51] simulated shape changes in through-mask electrochemical micromachining. The degree of undercut was predicted for vertictilly-walled cavities of different aspect ratios, assuming primary current distribution. The boundary-element method was used. [Pg.137]

A. C. West, C. Madore, M. Matlosz, and D. Landolt, Shape Changes during Through-Mask Electrochemical Micromachining of Thin Metal Films, J. Electrochem. Soc., 139, No. 2, 499-506 (1992). [Pg.159]

Electrochemical Micromachining with Ultrashort Voltage Pulses... [Pg.252]

Figure 11 (a) Principle of the electrochemical micromachining with ultrashort voltage... [Pg.254]

Figure 12 (a) Experimental setup for electrochemical micromachining. (See text for... [Pg.255]

M. Datta, L.T. Romankiw, AppUcation of chemical and electrochemical micromachining in the electronics industry. J. Electrochem. Soc. 136, 285C-292C, 1989. [Pg.262]

Electrochemical Micromachining and Microstructuring of Aluminum and Anodic Alumina... [Pg.215]

Fabrication of 3D Metallic and 3D Ceramic Microstructures Based on Electrochemical Micromachining of A1... [Pg.218]

IV. LOCALIZED ANODIZATION AND ELECTROCHEMICAL MICROMACHINING APPLICATIONS AND DEVICES... [Pg.231]

Fig. 13.1 Ink-jet nozzle plate fabricated by through-mask electrochemical micromachining, Schematic of the concept top), and a photograph showing an array of nozzles bottom) [23]...

Datta M (1995) Fabrication of an array of precision nozzles by through-mask electrochemical micromachining. J Electrochem Soc 142 3801-3805... [Pg.220]

Schuster R, Kirchner V, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289 98-101... [Pg.220]

FIGURE 2.15. Principle of electrochemical micromachining by short voltage pulses [14], (See color insert.)... [Pg.32]

FIGURE 2.17. A series of microstructures on stainless steel fabricated by the electrochemical micromachining technique [15]. [Pg.33]

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology. http //dx.doi.Org/10.1016/B978-0-323-32737-4.00002-5... [Pg.25]

M. Datta, D. Harris, Electrochemical micromachining an environmentally friendly, high speed processing technology, Electrochim. Acta 42 (20-22) (1997) 3007-3013. [Pg.52]

M. Datta, R.V. Shenoy, L.T. Rominkiw, Recent advances in the study of electrochemical micromachining, Trans. ASME 118 (1996) 29-36. [Pg.52]

Electrochemical micromachining (EMM) is anodic dissolution of metal by the electrochemical reaction while very low voltage is applied between the anode and the cathode separated by a very narrow gap preferably less than 50 pm. Pulsed power supply is applied for better localization of current. In the very narrow gap, in addition to electrolyte resistance other resistances that are not so prominent in conventional ECM have much more influence in EMM. Hence, all these resistance factors within the narrow gap are discussed along with the electrical circuit model of EMM. [Pg.53]

J.A. Kenney, G.S. Hwang, W. Shin, Two-dimensional computational model for electrochemical micromachining with ultrashort voltage pulses, Appl. Phys. Lett. 84 (2004) 3774, http //dx.doi.org/10.1063/... [Pg.68]

B. Bhattacharyya, B. Doloi, PS. Sridhar, Electrochemical micromachining new possibilities for micro manufacturing, J. Mater. Process. Technol. 113 (2001) 301-305. [Pg.68]

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