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Case Study II Poly-Si Surface Micromachining and Angular Rate Sensor

2 Case Study II Poly-Si Surface Micromachining and Angular Rate Sensor [Pg.417]

FIGURE 14.2 Poly-Si gear wheels of a 10 1 transmission, fabricated with the SUMMiT process. Courtesy Sandia National Laboratories, SUMMiT Technologies, www.mems. sandia.gov. [Pg.418]

FIGURE 14.4 Structure of the angular rate sensor (gyro), fabricated in poly-Si micromachining. [Pg.419]



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Angular rate

Angular surface micromachining

Micromachined

Micromachines

Micromachining

Poly , surface

Poly sensors

Si surface

Study II

Surface casing

Surface rate

Surface study

Surfaces studied

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