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Surface micromachining

An aspect distinguishing processing of surface machined MEMS devices from microelectronic structures is the use of sacrificial layers in the structure, that is, layers that are removed (usually by etching) after subsequent layers have been added. Removal is necessary so that some portion of the structure is sufficiently unrestrained or compliant to fulfill the mechanical function of the device. A persistent problem in surface machined MEMS structures is stiction, or the tendency for nearby surfaces to stick together due to capillary forces, electrostatic forces or other causes. [Pg.59]

Fabry-Perot interferometer is an optical resonator consisting of two parallel mirrors. Fabry-Perot interferometers can be made by silicon bulk microma-chining." " Silicon surface micromachining is also a suitable technique for making interferometers for infrared wavelengths. [Pg.1310]

The core components of a complete microsystem are the integrated sensing, acting or passive micromechanical devices. In most cases, a naked chip manufactured in bulk or surface micromachining is used for the detection of a physical or chemical quantity or some actuation principle, like the dosage of ink droplets in inkjet printheads. A complete microsystem can consist of a complex set of these devices. [Pg.201]

Cutting-edge Silicon-based Micromachined Sensors for Next Generation Household Appliances 205 5.8.1.3.3 Surface Micromachining of Silicon... [Pg.205]

Fig. 5.76 Principle schematic process flow of surface micromachined structures [2]. Fig. 5.76 Principle schematic process flow of surface micromachined structures [2].
CO Resistive sensors pellistors, metal-oxide sensors Optical sensors micro-spectrometer, IR-sources, IR-detectors, IR-filters Hybrid or integrated, surface micromachining Sn02 sintered thick film (Figaro, FIS,. ..), Sn02 thin and thick film on silicon (MiCS, Microsens) IR spectroscopy (Vaisala, Honeywell,. ..)... [Pg.223]

VOC (volatile organic compound Work-function sensors, micro-spectrometer, IR-sources, IR-detectors, I R-filters Hybrid or integrated, surface micromachining... [Pg.223]

D Processing Technology 200 Sensors, Actuators and Passive Components 201 Bulk Micromachining Technology 201 Surface Micromachining of Silicon 205 Summary 205... [Pg.303]

Surface layer dissociation behavior, in polymer colloids, 20 381-383 Surface layer impregnation, hydrothermal technology for, 14 105, 106t, 107t Surface layers, IR spectra of, 24 110 Surface micromachining in MEMS, 22 260 of MEMS devices, 26 964 Surface modification adsorbents, 1 585... [Pg.911]

J. Xie, X. Yang, X.Q. Wang, Y.C. Tai, Surface micromachined leakage proof parylene check valve, Proceedings of the 14th IEEE International Conference on... [Pg.51]

J. Xie, J. Shih, Y.C. Tai, Integrated surface-micromachined mass flow controller, Proceedings of the 16th IEEE International Conference on MicroElectro Mechanical Systems (MEMS 2003), Kyoto, Japan, 20 (2003). [Pg.52]

Two- and three-dimensional shapes and patterns can be reproduced in silicon with high precision using bulk and surface micromachining techniques [46,54]... [Pg.4]

Case Study II Poly-Si Surface Micromachining and Angular Rate Sensor... [Pg.417]

Figures 14.2 and 14.3 show closeups of poly-Si micromachines from Sandia Labs, manufactured by using several poly-Si CMP processes. Figure 14.2 depicts the gear wheels of a 10 1 transmission. Due to CMP, the gears are completely planar. Figure 14.3 shows the alignment clips for positioning the gears. The two layers of gears are clearly visible. More examples that show where the five-layer surface micromachining process has been employed are... Figures 14.2 and 14.3 show closeups of poly-Si micromachines from Sandia Labs, manufactured by using several poly-Si CMP processes. Figure 14.2 depicts the gear wheels of a 10 1 transmission. Due to CMP, the gears are completely planar. Figure 14.3 shows the alignment clips for positioning the gears. The two layers of gears are clearly visible. More examples that show where the five-layer surface micromachining process has been employed are...
Besides the application of micromirror arrays, nickel surface micromachining with a copper sacrificial layer is a technology that can be used for various microfabrication concepts. Only recently, the method has been applied for the construction of capacitive RF switches for antenna impedance matching in multiband mobile phones [26]. [Pg.424]

FIGURE 14.11 (a) Micromirror array, fabricated in metal surface micromachining. [Pg.425]

Fig. 3 Example of a silicon surface micromachined gear train. Courtesy of the Intelligent Micromachine Initiative, Sandia National Laboratories. Fig. 3 Example of a silicon surface micromachined gear train. Courtesy of the Intelligent Micromachine Initiative, Sandia National Laboratories.
D. J. Monk, D. S. Soane, and R. T. Howe, A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications. Thin Solid Films 232, 1, 1993. [Pg.483]

Fig. 1 Basic diagram of the surface micromachining process. (View this art in color at www. dekker.com.)... Fig. 1 Basic diagram of the surface micromachining process. (View this art in color at www. dekker.com.)...
Anguita, J. Briones, F. HF/H2O vapor etching of Si02 sacrificial layer for large-area surface-micromachined membranes. Sens. Actuators A 1998, 64 (3), 247-251. [Pg.3059]

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