Angular surface micromachining

Case Study II Poly-Si Surface Micromachining and Angular Rate Sensor... 

Neul, A low cost angular rate sensor for automotive applications in surface micromachining technology, Proc. Advanced Microsystems for Automotive Applications 99 (eds D. E. Ricken, W. Gessner), Springer, Berlin, Germany, 1999, 239-250 ... 

R. Neul, A low cost angular rate sensor in Si-surface micromachining technology for automotive applications SAE Technical Digest Series 990931, 1999. 

In practice, when actually manufacturing acceleration sensors by surface micromachining, the overall process flow outline must be filled in with the detailed specific processes - as discussed in the previous sections. This is described below, based on an actual production process used for acceleration sensors [26] and an angular rate sensor made solely by surface micromachining [27, 28]. 

Fig. 1.27. An array of surface-micromachined mirrors used in a portable digital projector. The center mirror has been removed to expose the remaining segments of the rectangular torsion bar and the electrodes used for angular positioning. (Photograph courtesy of Texas Instruments, Attleborough, Massaehusetts. Reproduced with permission.)...

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