Between micromachine structural elements

The mechanical resonance frequency is mainly determined by the masses and the coupling stiffness between the masses, here 6 kHz. For the detection an acceleration sensor is placed on each of the two masses, arranged in a comb structure by surface micromachining. The drive works electrodynamically. A permanent magnet causes a magnetic field vertical to the surface of the sensor element. Conductors on the masses, stimulated by an electrical current, experience a Lorentz force, which drives the masses. 

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