Through mask electrochemical micromachining

Electrochemical micromachining (EMM) is a technique designed to generate patterned microstructures in metals and alloys [ 145]. Microfabrication by EMM may involve maskless or through-mask dissolution. Maskless EMM uses the... 

West et al. [51] simulated shape changes in through-mask electrochemical micromachining. The degree of undercut was predicted for vertictilly-walled cavities of different aspect ratios, assuming primary current distribution. The boundary-element method was used. 

A. C. West, C. Madore, M. Matlosz, and D. Landolt, Shape Changes during Through-Mask Electrochemical Micromachining of Thin Metal Films, J. Electrochem. Soc., 139, No. 2, 499-506 (1992). 

Fig. 13.1 Ink-jet nozzle plate fabricated by through-mask electrochemical micromachining, Schematic of the concept top), and a photograph showing an array of nozzles bottom) [23]...

Datta M (1995) Fabrication of an array of precision nozzles by through-mask electrochemical micromachining. J Electrochem Soc 142 3801-3805... 

R.V. Shenoy, M. Datta, Effect of mask wall angle on shape evolution during through mask electrochemical micromachining, J. Electrochem. Soc. 143 (2) (1996) 544—549. 

Titanium surface microstructured by through mask electrochemical micromachining [23]. 

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